Transmission device, substrate transmission system and substrate transmission method
A technology of transmission device and transmission method, which is applied in the direction of conveyor, transportation and packaging, roller table, etc., can solve the problem of damage to the surface of the substrate, and achieve the effect of improving flatness, reducing damage, and improving production yield
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[0025] In order to enable those skilled in the art to better understand the technical solution of the present invention, a transmission device provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0026] This embodiment provides a transmission device, such as figure 2 As shown, the transmission device includes a plurality of transmission shafts 1 arranged in parallel, each transmission shaft 1 is provided with at least one roller 2, the rotating mechanism (not shown in the figure) drives the transmission shaft 1 to rotate, and the transmission shaft 1 drives the above The rollers 2 are rotated so that the rollers 2 can horizontally transport the substrate 3 under the action of friction. The rollers 2 on each conveying shaft 1 form at least one roller row 4 in the conveying plane, and at least two rollers 2 in the roller row 4 are arranged alternately along the conveying direction. Specifically, in figure 2 Among ...
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