High energy ion implantation machine radio frequency acceleration tuning device and control method

Abstract

The invention discloses a high energy ion implantation machine radio frequency acceleration tuning device. The high energy ion implantation machine radio frequency acceleration tuning device comprises a radio frequency power supply, a tuning controller, a tuning cylinder and a tuning motor; the tuning controller comprises a tuning control unit, a tuning motor control unit and a resonant state detection unit; the tuning control unit is respectively connected to the tuning motor control unit and the resonant state detection unit; and the tuning motor is connected to the tuning motor control unit. The high energy ion implantation machine radio frequency acceleration tuning control method comprises that: 1) a resonant detection unit is used for detecting an output signal of the radio frequency power supply and transmitting the output signal to the tuning control unit; 2) the tuning control unit is used for outputting a control signal to a resonant motor control unit according to the output signal of the radio frequency power supply; and 3) the tuning motor control unit controls resonance of the tuning motor according to the control signal in order to make the resonant cylinder in a resonance state. The high energy ion implantation machine radio frequency acceleration tuning device and control method are simple in operation and accurate in control.

Description

technical field [0001] The invention mainly relates to the technical field of ion implantation, in particular to a radio frequency acceleration tuning device and method for high-energy ion implanters. Background technique [0002] As early as the 1960s, ion implantation technology was applied to the production of semiconductor devices. Ion implantation technology is to ionize the atoms of a certain element, accelerate the ions in an electric field, and implant them into the surface of a solid material after obtaining a higher speed, so as to change the physical or chemical properties of the material surface. . [0003] The ion acceleration methods of the ion implanter include electrostatic field acceleration and radio frequency acceleration. The electrostatic field acceleration method is simple to implement, but it needs enough insulating space. When the energy is higher, the space required is larger, and the volume of the device will become larger and larger. Therefore, ...

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Problems solved by technology

However, the currently used radio frequency acceleration tuning device has a complex structure and is inconvenient to operate

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