A low refractive index optical coating material with uniform film formation and preparation method thereof
A low-refractive-index, optical coating technology, applied in optics, optical components, sputtering, etc., can solve problems such as microscopic unevenness of the film layer, reduce stress, solve the problem of film cracking, and ensure stability.
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[0016] Obviously, many modifications and changes made by those skilled in the art based on the gist of the present invention belong to the protection scope of the present invention.
[0017] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in this specification refers to the presence of said features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, Steps, operations, elements, components and / or groups thereof. It will be understood that when an element or component is referred to as being "connected" to another element or component, it can be directly connected to the other element or component or intervening elements or components may also be present. As used herein, the term "and / or" includes any and all co...
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