Masking plate and array substrate manufacturing method

A mask plate and substrate technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, electric solid-state devices, etc., can solve the problems of affecting the quality of substrate packaging, affecting product yield, and poor support effect, so as to save production costs, Reduced substrate mass and friction reduction effects

Inactive Publication Date: 2017-10-20
SHANGHAI TIANMA AM OLED
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The inventors of the present application found that the process of processing the support protrusions on the surface of the substrate is more complicated when implementing the scheme; The friction debris generated by board friction is easy to adhere to the surface of the substrate, which affects the p

Method used

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  • Masking plate and array substrate manufacturing method
  • Masking plate and array substrate manufacturing method
  • Masking plate and array substrate manufacturing method

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Example Embodiment

[0064] In order to simplify the manufacturing process of the OLED display panel, save the manufacturing cost, and improve the product yield, an embodiment of the present invention provides a manufacturing method of a mask plate and an array substrate. In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail with reference to the following examples.

[0065] like image 3 and Figure 4As shown, the mask provided by the embodiment of the present invention includes a mask body 1 and a support structure 10. The mask body 1 has a first side surface facing the substrate 2 and a second side surface facing away from the substrate 2 during the evaporation process. On the side surface, the support structure 10 includes a plurality of support protrusions 11 disposed on the first side surface of the mask body 1 , and the surfaces of the support protrusions 11 are smooth transition surfa...

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Abstract

The invention discloses a masking plate and array substrate manufacturing method and aims to simplify the manufacturing process of an organic light-emitting diode display panel, save manufacturing cost and improve the product yield. The masking plate comprises a masking plate body and a supporting structure, wherein the masking plate body has a first side surface facing a substrate in the vapor plating process and a second side surface at the back of the substrate, the supporting structure comprises multiple supporting projections arranged at the first side surface of the masking plate body, and surfaces of the supporting projections are smooth transition surfaces.

Description

technical field [0001] The present invention relates to the technical field of manufacturing OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display devices, in particular to a method for manufacturing a mask plate and an array substrate. Background technique [0002] OLED display devices have the advantages of thinness, lightness, wide viewing angle, active luminescence, continuously adjustable luminous color, low cost, fast response, low energy consumption, low driving voltage, wide operating temperature range, simple production process, high luminous efficiency and Flexible display and other advantages have been listed as a promising next-generation display technology. [0003] The pixel structure of an OLED display device includes a plurality of sub-pixels arranged in a certain arrangement, wherein each sub-pixel includes an anode layer, a cathode layer, and an organic light-emitting layer located between the anode layer and the cathode layer, and organ...

Claims

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Application Information

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IPC IPC(8): H01L51/56
CPCH10K71/166H10K71/00
Inventor 张佳灵
Owner SHANGHAI TIANMA AM OLED
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