Film forming equipment

Abstract

The invention discloses film forming equipment. The film forming equipment comprises a shell; the internal of the shell is a film forming chamber; a material source to be grown is arranged at the upper part or the lower part of the film forming chamber; a worktable for placing workpieces is arranged at the lower part or the upper part of the film forming chamber; heating equipment is arranged in the worktable; the worktable is driven to move up and down by a linear motion mechanism; and the linear motion mechanism is controlled by a controller. The film forming equipment can return and adjust gaps from the material source to the workpieces, and can guarantee the thickness consistency and uniformity of film layers on the surfaces of the workpieces and the physical property adjustability of the film layers.

Description

technical field [0001] The invention relates to the technical field of physical vapor deposition, in particular to a film forming device. Background technique [0002] Physical vapor deposition (Physical Vapor Deposition, referred to as PVD) refers to the use of physical processes to achieve material transfer, the process of transferring atoms or molecules from the material source to be grown to the surface of the workpiece. Its function is to spray some particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance, etc.) on the workpiece with lower performance, so that the workpiece has better performance. [0003] Plasma Enhanced Chemical Vapor Deposition (PECVD for short) uses microwave or radio frequency to make the gas containing the constituent atoms of the film locally form a plasma, and the plasma is chemically active and easy to react. The desired film can be deposited on the substrate. [0004] Conventional film forming...

AI Technical Summary

Problems solved by technology

However, the material source will gradually be consumed and thinned in the long-term production process, and the consumption degree of each position of the material source is not the same, which is easy to cause the thickness of the film layer to be consistent and uniform after the material source has been used for a period of time. sex cannot be guaranteed

Images