Low-cost biochemical sensor based on narrow-linewidth microcavity and broadband light source

A biochemical sensor and broadband light source technology, applied in the field of biochemical sensors, can solve the problems of unsuitable commercial promotion value and high cost, and achieve the effects of small structure size, reduced cost and simple structure

Inactive Publication Date: 2017-11-24
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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AI Technical Summary

Problems solved by technology

However, currently such sensors mostly use ultra-narrow linewidth tunable lasers, which are expensive to manufacture and require a large number of scientific research equipment and professional operators to realize, which is not suitable for real commercial promotion value.

Method used

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  • Low-cost biochemical sensor based on narrow-linewidth microcavity and broadband light source
  • Low-cost biochemical sensor based on narrow-linewidth microcavity and broadband light source
  • Low-cost biochemical sensor based on narrow-linewidth microcavity and broadband light source

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the description of the drawings and the specific embodiments.

[0019] The invention adopts SOI (Silicon-on-insulator) and sequentially prepares on-chip micro-ring resonant cavity and waveguide through exposure and etching. A typical dual-straight waveguide-coupled microring cavity consists of two straight waveguides and a curved waveguide. The structure is as attached figure 1 Shown.

[0020] When the light of a certain wavelength range is incident from the A end (Input end) and transmitted to the first coupling zone composed of the first straight waveguide and the microring, part of the light is coupled into the microring cavity, and the remaining part is from the B end (Through end) Output. When the light propagating in the microring passes through the second coupling region formed by the second straight waveguide and the microring, part of the light is coupled into the second straight waveguide, a...

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Abstract

The invention provides a low-cost biochemical sensor based on a narrow-linewidth microcavity and a broadband light source. The low-cost biochemical sensor based on the narrow-linewidth microcavity and the broadband light source comprises the broadband light source and a double straight waveguide coupled micro-ring cavity, wherein the double straight waveguide coupled micro-ring cavity comprises a first straight waveguide, a second straight waveguide and a micro-ring resonant cavity; the micro-ring resonant cavity and the waveguides are prepared on SOI sequentially via exposure and etching; the micro-ring resonant cavity is in coupling connection with the first straight waveguide and the second straight waveguide separately; the broadband light source is input into the double straight waveguide coupled micro-ring cavity; sensing can be realized by monitoring the intensity change of an output signal of the double straight waveguide coupled micro-ring cavity. The low-cost biochemical sensor based on the narrow-linewidth microcavity and the broadband light source can effectively increase the measuring flux, greatly reduces the manufacturing cost and meet the portable requirement; the output light power is directly detected by using the broadband light source, so the sensitivity of the sensor is effectively improved.

Description

Technical field [0001] The invention belongs to the technical field of optical sensors, and specifically relates to a biochemical sensor based on a narrow linewidth microcavity and a broadband light source. Background technique [0002] Taking into account the progress of micro-nano preparation technology and clinical actual needs, higher requirements will be put forward for the integration and cost control of sensors in the future. At this stage, high-precision detection technology largely relies on large-scale equipment and cutting-edge scientific research equipment, such as scientific-grade spectrometers and narrow-linewidth tunable lasers used in optical sensing, and large-scale equipment for sample pretreatment. These devices are bulky, difficult to operate, and expensive, which limits the commercialization of high-precision sensors. These restrictions make it impossible for such sophisticated equipment to be used in remote and rural areas where it is really needed. At the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
CPCG01N21/41G01N2021/4166
Inventor 宋清海于晓依周振星肖淑敏
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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