Low-cost biochemical sensor based on narrow-linewidth microcavity and broadband light source
A biochemical sensor and broadband light source technology, applied in the field of biochemical sensors, can solve the problems of unsuitable commercial promotion value and high cost, and achieve the effects of small structure size, reduced cost and simple structure
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[0018] The present invention will be further described below in conjunction with the description of the drawings and the specific embodiments.
[0019] The invention adopts SOI (Silicon-on-insulator) and sequentially prepares on-chip micro-ring resonant cavity and waveguide through exposure and etching. A typical dual-straight waveguide-coupled microring cavity consists of two straight waveguides and a curved waveguide. The structure is as attached figure 1 Shown.
[0020] When the light of a certain wavelength range is incident from the A end (Input end) and transmitted to the first coupling zone composed of the first straight waveguide and the microring, part of the light is coupled into the microring cavity, and the remaining part is from the B end (Through end) Output. When the light propagating in the microring passes through the second coupling region formed by the second straight waveguide and the microring, part of the light is coupled into the second straight waveguide, a...
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