Multifunctional self-cleaning probe plate

A self-cleaning, probe card technology, applied in the field of probe cards and multi-functional self-cleaning probe cards, can solve the problems of cleaning agent residues and bristles fibers falling, so as to prevent inaccuracies and facilitate maintenance and replacement. Effect

Pending Publication Date: 2017-11-24
LUOYANG BINGYAN LASER EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with this brush and its method of cleaning the probe board, fibers from the bristles often fall onto the probe board
Mo

Method used

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  • Multifunctional self-cleaning probe plate
  • Multifunctional self-cleaning probe plate
  • Multifunctional self-cleaning probe plate

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0027] Example 1

[0028] As attached Figure 1-6 As shown, a multifunctional self-cleaning probe card includes a wiring substrate 1, a support plate 2, and probes 3. The probes 3 are mounted on the wiring substrate 1, and the wiring substrate 1 is fixedly mounted by connecting posts 4 On the support board 2, three slots 5 are installed on the wiring substrate 1, the slots 5 are provided with connecting fasteners 6 on both sides of the mouth, the slots 5 are provided with terminal posts 7, the The terminal 7 of the wiring substrate 1 is connected to the probe 3 at the corresponding position through the circuit on the wiring substrate 1; a through hole 8 is provided at the corresponding position of the wiring substrate 1 and the support plate 2, and a compressed air duct is installed in the through hole 8 9. The air outlet end of the compressed air pipe 9 is connected to a transverse pipe 10, and a gas nozzle 11 is arranged on the transverse pipe 10, and the gas nozzle 11 is arran...

Example Embodiment

[0031] Example 2

[0032] As attached Figure 1-8 As shown, a multifunctional self-cleaning probe card includes a wiring substrate 1, a support plate 2, and probes 3. The probes 3 are mounted on the wiring substrate 1, and the wiring substrate 1 is fixedly mounted by connecting posts 4 On the support board 2, three slots 5 are installed on the wiring substrate 1, the slots 5 are provided with connecting fasteners 6 on both sides of the mouth, the slots 5 are provided with terminal posts 7, the The terminal 7 of the wiring substrate 1 is connected to the probe 3 at the corresponding position through the circuit on the wiring substrate 1; a through hole 8 is provided at the corresponding position of the wiring substrate 1 and the support plate 2, and a compressed air duct is installed in the through hole 8 9. The air outlet end of the compressed air pipe 9 is connected to a transverse pipe 10, and a gas nozzle 11 is arranged on the transverse pipe 10, and the gas nozzle 11 is arra...

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PUM

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Abstract

The invention discloses a multifunctional self-cleaning probe plate which comprises a routing substrate, a support plate and probes. The probes are mounted on the routing substrate, the routing substrate is fixedly mounted on the support plate via connecting columns, three slots are formed in the routing substrate, connecting fasteners are arranged on two sides of an opening of each slot, and wiring columns are arranged in the slots and are connected with the probes at corresponding locations by circuits on the routing substrate; through holes are formed in the routing substrate and correspond to the support plate, compressed air pipelines are mounted in the through holes, transverse pipelines are connected with gas outlet ends of the compressed air pipelines, and gas spray nozzles are arranged on the transverse pipelines and are opposite to the ends of the bottoms of the probes. The multifunctional self-cleaning probe plate has the overall advantages that the multifunctional self-cleaning probe plate can be in excellent contact with test elements and is high in test efficiency, and good self-cleaning effects can be realized.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and relates to a probe board, in particular to a multifunctional self-cleaning probe board. Background technique [0002] In the semiconductor integrated circuit industry, when performing wafer-level reliability testing on a fully automatic testing system, probe cards are usually used for auxiliary testing. The existing probe cards fix one end of the probe on the circuit The board is then connected to the test machine through the circuit board, and the other end of the probe is in contact with the probe point of each test unit on the wafer, thus forming a complete test system. The function of the probe card is to connect the test machine and the structure under test by piercing the pad. [0003] In the semiconductor factory, the probe board is an important part required in the reliability test of the wafer chip. In order to ensure that the probes of the probe board are in a good state, it...

Claims

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Application Information

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IPC IPC(8): G01R1/073
CPCG01R1/07357
Inventor 宋江岩贾小杰梁利波
Owner LUOYANG BINGYAN LASER EQUIP
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