Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Multifunctional self-cleaning probe plate

A self-cleaning, probe card technology, applied in the field of probe cards and multi-functional self-cleaning probe cards, can solve the problems of cleaning agent residues and bristles fibers falling, so as to prevent inaccuracies and facilitate maintenance and replacement. Effect

Pending Publication Date: 2017-11-24
LUOYANG BINGYAN LASER EQUIP
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with this brush and its method of cleaning the probe board, fibers from the bristles often fall onto the probe board
Moreover, due to the presence of detergent on the bristles, after brushing, there are often detergent residues on the probe plate

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Multifunctional self-cleaning probe plate
  • Multifunctional self-cleaning probe plate
  • Multifunctional self-cleaning probe plate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] as attached Figure 1-6 As shown, a multifunctional self-cleaning probe card includes a wiring substrate 1, a support plate 2, and a probe 3. The probe 3 is installed on the wiring substrate 1, and the wiring substrate 1 is fixed and installed through a connecting column 4. On the support plate 2, three slots 5 are installed on the wiring substrate 1, connecting fasteners 6 are arranged on both sides of the mouth of the slot 5, and binding posts 7 are arranged in the slot 5. The connecting post 7 is connected to the probe 3 at the corresponding position through the circuit on the wiring substrate 1; through holes 8 are set at the corresponding positions of the wiring substrate 1 and the support plate 2, and a compressed air duct is installed in the through holes 8 9. The air outlet end of the compressed air duct 9 is connected to a transverse duct 10 , and a gas nozzle 11 is arranged on the transverse duct 10 , and the gas nozzle 11 is arranged at a position opposite to...

Embodiment 2

[0032] as attached Figure 1-8 As shown, a multifunctional self-cleaning probe card includes a wiring substrate 1, a support plate 2, and a probe 3. The probe 3 is installed on the wiring substrate 1, and the wiring substrate 1 is fixed and installed through a connecting column 4. On the support plate 2, three slots 5 are installed on the wiring substrate 1, connecting fasteners 6 are arranged on both sides of the mouth of the slot 5, and binding posts 7 are arranged in the slot 5. The connecting post 7 is connected to the probe 3 at the corresponding position through the circuit on the wiring substrate 1; through holes 8 are set at the corresponding positions of the wiring substrate 1 and the support plate 2, and a compressed air duct is installed in the through holes 8 9. The air outlet end of the compressed air duct 9 is connected to a transverse duct 10 , and a gas nozzle 11 is arranged on the transverse duct 10 , and the gas nozzle 11 is arranged at a position opposite to...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a multifunctional self-cleaning probe plate which comprises a routing substrate, a support plate and probes. The probes are mounted on the routing substrate, the routing substrate is fixedly mounted on the support plate via connecting columns, three slots are formed in the routing substrate, connecting fasteners are arranged on two sides of an opening of each slot, and wiring columns are arranged in the slots and are connected with the probes at corresponding locations by circuits on the routing substrate; through holes are formed in the routing substrate and correspond to the support plate, compressed air pipelines are mounted in the through holes, transverse pipelines are connected with gas outlet ends of the compressed air pipelines, and gas spray nozzles are arranged on the transverse pipelines and are opposite to the ends of the bottoms of the probes. The multifunctional self-cleaning probe plate has the overall advantages that the multifunctional self-cleaning probe plate can be in excellent contact with test elements and is high in test efficiency, and good self-cleaning effects can be realized.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and relates to a probe board, in particular to a multifunctional self-cleaning probe board. Background technique [0002] In the semiconductor integrated circuit industry, when performing wafer-level reliability testing on a fully automatic testing system, probe cards are usually used for auxiliary testing. The existing probe cards fix one end of the probe on the circuit The board is then connected to the test machine through the circuit board, and the other end of the probe is in contact with the probe point of each test unit on the wafer, thus forming a complete test system. The function of the probe card is to connect the test machine and the structure under test by piercing the pad. [0003] In the semiconductor factory, the probe board is an important part required in the reliability test of the wafer chip. In order to ensure that the probes of the probe board are in a good state, it...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01R1/073
CPCG01R1/07357
Inventor 宋江岩贾小杰梁利波
Owner LUOYANG BINGYAN LASER EQUIP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com