A substrate transfer device and method, and evaporation equipment

Abstract

The invention discloses a substrate conveying device, a method, and evaporation equipment, which relate to the field of evaporation technology and are used to reduce the cumbersomeness of replacing a carrying mechanism and a separation mechanism when changing the size of a display device to be fabricated on a substrate substrate. The substrate conveying device includes a carrying mechanism, a separation mechanism and a lifting mechanism, the carrying mechanism includes a carrying mechanism body, and the top surface of the carrying mechanism body is provided with a fixing piece and a separation hole; the separation mechanism is arranged in a housing chamber of the carrying mechanism body, Lifting holes are provided on the bottom surface of the carrying mechanism body, and the accommodation cavity communicates with the separation hole and the lifting hole respectively, and the accommodation cavity communicates with the outside world through the lifting holes, and the lifting mechanism is located outside; the substrate transfer method uses the substrate transfer device mentioned in the above technical solution . The substrate conveying device provided by the invention is used in the technical field of vapor deposition.

Description

technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a substrate conveying device and method, and vapor deposition equipment. Background technique [0002] An OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display device has many advantages such as low energy consumption, high contrast ratio, wide viewing angle, etc., and is a display device that has attracted extensive attention at present. At present, the mainstream production process of OLED display devices is evaporation technology, and the evaporation equipment used generally includes inline evaporation equipment (inline type) and cluster type evaporation equipment (cluster type). For OLED display devices, the substrate to be evaporated is fixed by the carrying mechanism, and the fixed substrate to be evaporated is aligned with the corresponding mask plate. After the alignment is completed, the carrying mechanism controls the substrate to be evapora...

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Problems solved by technology

[0004] The object of the present invention is to provide a substrate conveying device and method, and evaporation equipment, which are used to solve the problem that in the existing evaporation equipment, when changing the size of the display device to be produced, the process of replacing the separation mechanism is cumbersome and reduces production efficiency. The problem

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