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Ultra-high temperature passive thin-film temperature sensor and manufacturing method thereof

A technology of film temperature and production method, which is applied in thermometers, thermometers and instruments using electrical/magnetic components directly sensitive to heat, etc., can solve the problem that temperature sensors cannot accurately measure temperature parameters, etc., to expand the test range and reduce manufacturing. The effect of low cost and saving of production materials

Active Publication Date: 2017-12-01
ZHONGBEI UNIV
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Problems solved by technology

[0003] In order to solve the technical problem that the existing temperature sensor cannot accurately measure temperature parameters in an ultra-high temperature environment, the present invention provides an ultra-high temperature passive film temperature sensor and a manufacturing method thereof

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  • Ultra-high temperature passive thin-film temperature sensor and manufacturing method thereof
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  • Ultra-high temperature passive thin-film temperature sensor and manufacturing method thereof

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Embodiment Construction

[0042] Such as figure 1 , 2 As shown, an ultra-high temperature passive film temperature sensor includes a dielectric substrate 1 and a planar spiral inductor 2, the dielectric substrate 1 is made of alumina ceramics, the planar spiral inductor 2 is made of platinum metal, and the planar spiral inductor 2 is located at On one side of the dielectric substrate 1, there is a parasitic capacitance in the planar spiral inductor 2, and the planar spiral inductor 2 and the parasitic capacitance form an LC resonant loop.

[0043] According to the relevant theory and experimental results, the Q value of the sensor decreases and the signal strength decreases under high temperature environment. High temperature causes the parasitic capacitance and parasitic resistance of the sensor to increase, and the main reason for signal weakening is the increase of parasitic resistance. Therefore, optimizing the structural size of the sensor and reducing the parasitic resistance are very important...

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Abstract

The invention belongs to the technical field of temperature sensors and in order to address failure of current temperature sensors to accurately measure the temperature parameter under ultra-high temperature environment, provides an ultra-high temperature passive thin-film temperature sensor and a manufacturing method thereof. The ultra-high temperature passive thin-film temperature sensor herein includes a medium substrate and a planar spiral inductor. The planar spiral inductor is disposed on one side of the medium substrate and is provided with a stray capacitor. The planar spiral inductor and the stray capacitor constitute a LC resonance circuit. According to the invention, the sensor herein uses the LC resonance theory to obtain a signal in a wireless manner and prints a platinum to a high purity aluminum oxide ceramic substrate, and greatly expands the range of tests at high temperature. According to the invention, the sensor herein obviates the need for extra power supplies, can remote measure and read signals in a non-contact manner from long distance, can measure temperature in high-temperature and bad environment and enclosed environment. Further, according to the invention, the sensor herein has the characteristic of simple structure, easy preparation, and lower manufacturing cost compared with traditional sensor structures.

Description

technical field [0001] The invention belongs to the technical field of temperature sensors, and in particular relates to an ultra-high temperature passive film temperature sensor and a manufacturing method thereof. Background technique [0002] In the high temperature environment, the current temperature measurement methods at home and abroad mainly include thermocouple method, infrared temperature measurement sensor, LC resonant temperature sensor and so on. The thermocouple method is a contact temperature measurement. The probe is placed in the measured environment. This kind of temperature sensor has a long distance between the hot and cold ends, large volume, and uses rare and precious metals. It is expensive and has a short service life, which cannot meet the airtight measurement. Traditional temperature sensors will have problems such as high-temperature failure of the connecting lead at higher temperatures, so higher temperature measurements cannot be performed; altho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/36
CPCG01K7/36
Inventor 谭秋林唐顺樊磊张磊熊继军王海星董和磊
Owner ZHONGBEI UNIV
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