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Device and method for realizing laser cavitating cleaning micro-nano-particles on surface of material

A micro-nano particle and laser technology, applied in chemical instruments and methods, cleaning methods and utensils, etc., can solve problems such as documents and patents that have not been retrieved, achieve better, more convenient and accurate measurement results, improve processing efficiency, and reduce dispersion. Effect

Inactive Publication Date: 2017-12-15
JIANGSU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The use of laser cavitation to clean the micro-nano particles on the metal surface is of great significance to the subsequent processing of the material surface, but the relevant literature and patents on the methods and devices in this regard have not yet been retrieved

Method used

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  • Device and method for realizing laser cavitating cleaning micro-nano-particles on surface of material

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Embodiment

[0018] Embodiment: Install the silicon chip on the clamping device, the silicon chip is placed in the container that deionized water is housed, the movement of the silicon chip is controlled by the three-dimensional mobile platform 8, and the laser is adjusted to focus on the upper side of the silicon chip surface, wherein the pulse Nd: The process parameters of the YAG laser are: the output wavelength is 1.06 μm, and the pulse width is 10 ns. Utilize the computer 1 to inject water into the water tank 3 through the liquid pump 12, control the displacement of the water pump 12, ensure that the liquid in the water tank 3 circulates and maintains a constant capacity;

[0019] Adjust the parameters of the laser 18 by the laser controller 19, adjust the three-dimensional mobile platform 8 by the computer 1 to determine the position of the laser cavitation cleaning of the workpiece 6 and the distance between the cavitation 5 at the focus position; When laser cavitation is generated ...

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Abstract

The invention relates to a device and method for realizing laser cavitating cleaning micro-nano-particles on the surface of a material. The device comprises a water box and a loading table located in the water box. The water box is arranged on a three-dimensional movable working table. A laser cavitating device is installed above the water box. The laser caviating device and the three-dimensional movable working table are connected with a computer. A voltage sensor detecting device is installed on the material. The voltage sensor detecting device is connected with the computer through a data processing device. When laser beams and water produce a cavitation effect, cavitation bubbles are induced to be produced, high pressure shock waves and micro jet produced after cavitation bubbles collapse can produce actionof cleaningthe micro-nano-particles on the surface of the material on a workpiece; and meanwhile, a pressure gradient is formed on the surfaces of the cavitation bubbles, the pressure gradient can drive the cavitation bubbles to move a target material, so that pressure changes are produced on the surface of the material. According to the device for realizing laser cavitating cleaning the micro-nano-particles on the surface of the material, the pressure changes of the surface the workpiece are used as characteristic parameters to judge the effect of laser cavitating cleaning the micro-nano-particles on the surface of the material, so that the measurement result is more convenient and accurate.

Description

technical field [0001] The invention relates to a device and method for realizing laser cavitation cleaning of micro-nano particles on the surface of materials, and is applicable to the technical field of using laser to clean attached micro-nano particles on the surface of workpieces. Background technique [0002] The principle of laser cavitation is similar to that of laser impacting a target in a liquid medium. The difference is that laser cavitation does not focus the laser directly on the surface of the material, but at a certain distance above the material. When the laser energy is high enough, a "laser cavitation" will be generated. The phenomenon of “cavitation”, that is, under the action of laser energy, when the breakdown threshold is reached, a small bubble, that is, a cavitation, will be excited in the liquid. With the accumulation of energy, a pressure difference is formed inside and outside the cavitation. It is precisely because of the pressure difference The e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/0042B08B13/00
Inventor 任旭东石佑敏任云鹏张新洲陈兰孙建荣李琳
Owner JIANGSU UNIV
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