Automatic control method of diffusion furnace

Abstract

The invention discloses an automatic control method of a diffusion furnace. The automatic control method of the diffusion furnace comprises the following steps of: step 101. vacuumizing to a setting pressure; step 102. heating a furnace body to a setting temperature; step 103. stopping vacuumizing, and inflating to a second setting pressure; step 104. stopping inflating, and heating to a second temperature; step 105. stopping heating, and meanwhile inflating to a third pressure; step 106. stopping inflating, and meanwhile naturally cooling the furnace body to a third temperature; step 107. turning on a draught fan, meanwhile maintaining pressure, and cooling to a setting temperature; and step 108. shutting off the draught fan, and deflating. The automatic control method of the diffusion furnace has the beneficial effects that the automatic control method ensures that the temperature of a hearth changes strictly according to a given temperature curve, not only can rise in a temperature-rise period according to setting requirements, but also can quickly reach a steady state; the overshoot of the temperature curve is very small; the control accuracy can reach within 1%; the automation of the whole technical process of production is realized; and the labor intensity of operating personnel is reduced.

Description

Technical field [0001] The invention relates to the field of diffusion furnaces, in particular to an automatic control method for diffusion furnaces. Background technique [0002] Diffusion furnace is one of the important process equipment in the pre-process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering in large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. However, the temperature and process control of the traditional diffusion furnace control system is realized manually by adjusting various control instruments. Not only the labor intensity of the operator is large, the degree of automation is low, but the test accuracy is difficult to guarantee. Summary of the invention [0003] The purpose of the present invention is to solve the problems mentioned in the background art section by means of an automatic control method for the diffusion furnace. [0004] To achi...

AI Technical Summary

Problems solved by technology

However, the temperature and process control of the traditional diffusion furnace control system is realized manually by adjusting various control instruments. Not only the labor intensity of the operator is high, the degree of automation is low, and the accuracy of the test is difficult to guarantee

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