Gaseous corrosion cavity capable of adjusting internal and external pressure difference and gaseous corrosion method of gaseous corrosion cavity

Abstract

The invention discloses a gaseous corrosion cavity capable of adjusting internal and external pressure difference, and the cavity comprises an upper cavity, a lower cavity, and a lifting control device. The lifting control device is connected with the upper cavity, and controls the upper cavity to move up and down. The lower cavity is fixed, and is provided with a cavity air inlet and a cavity airoutlet. The cavity also comprises a cavity draft control apparatus, wherein the cavity draft control apparatus is connected with the cavity air outlet, and carries out the adjustment of the internaland external pressure of the cavity. The cavity provided by the invention can maintain the balancing of the internal and external pressures of the cavity, and the cavity made of a nonmetal material can be protected from being damaged. The invention also discloses a method of carrying out the gaseous corrosion of a wafer through the cavity.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing equipment, in particular to a gas phase corrosion chamber capable of adjusting the pressure difference inside and outside. Background technique [0002] In recent years, silicon oxide has been etched by vapor phase etching (using hydrogen fluoride in gas phase). Compared with liquid phase corrosion, gas phase corrosion has many advantages: 1. Release MEMS devices without adhesion; 2. Because it is not affected by surface tension, the diffusion capacity of reactants is 4 orders of magnitude higher than that in liquid phase. So the chemical reaction is easier to carry out; 3. Compatibility to various materials, such as aluminum, alumina, photoresist, etc.; 4. Because it is usually used under vacuum, it can be integrated as a surface pre-cleaning module in the modular Combined equipment, such as physical vapor deposition machines, etc. Hydrogen fluoride vapor phase corrosion is not only u...

AI Technical Summary

Problems solved by technology

Usually simply relying on pressure sensors or differential pressure sensors, vacuum pumps or exhaust air is difficult to control the sharp increase or decrease of the pressure cavity in the cavity in a short period of time, so the fault tolerance rate of the plastic cavity is not high compared to the metal cavity

Generally, the way to avoid the sharp increase and decrease of the pressure in the cavity is to slow down its drastic changes, that is, to prolong the intake and pumping time, which will eventually lead to an increase in the entire process time and some loss of production capacity.

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