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Non-contact normally closed phase change microvalve based on resistance heating

A non-contact, resistance heating technology, applied in the field of microfluidics, can solve the problems of only one-time use, contamination of sample reagent solution, etc., achieving the effect of easy control, compact structure, and enlarged application range

Inactive Publication Date: 2018-02-09
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the normally closed micro-valves driven by the phase change of the phase change material are all contact phase change valves, and the contact phase change valve has the disadvantages that the phase change material is easy to pollute the sample reagent solution and can only be used once.

Method used

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  • Non-contact normally closed phase change microvalve based on resistance heating
  • Non-contact normally closed phase change microvalve based on resistance heating
  • Non-contact normally closed phase change microvalve based on resistance heating

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Embodiment Construction

[0037] specific implementation plan

[0038] as attached Figure 1-2 As shown, the embodiment of the present invention provides a resistive heating type normally closed phase change microvalve, including a main channel chip 1, an elastic film I8, a control flow channel chip 9, an elastic film II13, a heating cavity chip 14, and a glass substrate 17 , Micro heater I18 and micro heater II19. In this example, the sample phase change material is paraffin wax, and the sample liquid is deionized water.

[0039] The main channel chip 1 of the present invention is manufactured by an etching process, and the specific process flow is as follows:

[0040] (a) as attached Figure 7 , a layer of positive photoresist was spin-coated on the surface of glass substrate I23 with a thickness of 0.5 mm, and after being dried on a glue drying station (110°C), the positive photoresist was exposed with a mask plate I24, and the Develop in 6‰ NaOH developer solution, rinse with deionized water, a...

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Abstract

The invention discloses a non-contact normally closed phase change microvalve based on resistance heating, and belongs to the technical field of microfluidics. The non-contact normally closed phase change microvalve based on resistance heating comprises a main runner chip, an elastic film I, a control runner chip, an elastic film II, a heating cavity chip and a glass substrate from top to bottom;the main runner chip structurally comprises a liquid inlet, a main runner liquid inlet side, a stopper, a main runner liquid outlet side and a liquid outlet; the liquid inlet and the liquid outlet arecircular holes, penetrate through the main runner chip, and communicate with the main runner liquid inlet side and the main runner liquid outlet side; the stopper is positioned between the main runner liquid inlet side and the main runner liquid outlet side, and is integrated with a microvalve upper chip; and the bottom edge is leveled with the bottom surface of the microvalve upper chip. The microvalve uses a resistance microheater for heating, and uses heat expansion, generated in phase change of a phase change material, for realizing control of a pressure difference between the main runnerand a control cavity so as to further realize control of the microvalve.

Description

technical field [0001] The invention is a non-contact normally closed phase change microvalve based on resistance heating. Specifically, it is a normally closed phase-change microvalve manufactured by micro-machining technology. The micro-valve is heated by a resistive micro-heater, and the thermal expansion generated when the phase-change material is phase-transformed is used to control the pressure difference between the main channel and the control chamber. Realize the control of the microvalve. The invention relates to a resistance thermally driven normally closed microvalve which is conveniently integrated into a microfluidic chip system, and belongs to the field of microfluidic technology. Background technique [0002] Phase change microvalve is a kind of microvalve that uses the volume change when the material changes phase to switch or adjust the flow rate. It is an important branch of thermal expansion microvalve. Its production cost is relatively low and it has a ...

Claims

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Application Information

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IPC IPC(8): F16K99/00F16K31/64
CPCF16K99/0032F16K99/0036F16K99/0044F16K2099/0082
Inventor 刘本东杨杰超张震杨佳慧
Owner BEIJING UNIV OF TECH
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