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Frequency Tunable Surface Acoustic Wave Resonators

A surface acoustic wave and resonator technology, applied in the field of frequency-adjustable surface acoustic wave resonators, can solve the problems of inflexible and inconvenient adjustment of the resonant frequency of the surface acoustic wave resonator, and achieve easy implementation, flexible frequency adjustment, and technological progress. simple effect

Active Publication Date: 2020-10-02
YANGZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In short, the existing problems in the prior art are: the adjustment of the resonant frequency of the surface acoustic wave resonator is inflexible and inconvenient

Method used

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  • Frequency Tunable Surface Acoustic Wave Resonators
  • Frequency Tunable Surface Acoustic Wave Resonators
  • Frequency Tunable Surface Acoustic Wave Resonators

Examples

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Embodiment Construction

[0039] Such as figure 1 , 2 As shown, the frequency tunable surface acoustic wave resonator of the present invention includes a piezoelectric substrate 1, a metal structure layer stacked on the piezoelectric substrate 1 in sequence, an intermediate dielectric layer and a voltage regulation electrode layer;

[0040] Such as image 3 As shown, the metal structure layer includes an interdigital transducer 2, a first short-circuit reflection array 31 and a second short-circuit reflection array 32 which are separated on both sides of the interdigital transducer 2;

[0041] Such as Figure 4 As shown, the intermediate dielectric layer includes a first intermediate dielectric layer 51, a second intermediate dielectric layer 52 and a third intermediate dielectric layer 53, the first intermediate dielectric layer 51 is stacked on the interdigital transducer 2 and In the same shape as the interdigital transducer 2, the second intermediate dielectric layer 52 is laminated on the first...

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Abstract

The invention discloses a frequency-tunable surface acoustic wave resonator, which comprises a piezoelectric substrate (1), a metal structure layer sequentially stacked on the piezoelectric substrate (1), an intermediate medium layer, and a voltage regulation electrode layer; The metal structure layer comprises an interdigital transducer (2), a first short-circuit reflection array (31) and a second short-circuit reflection array (32) which are separated on both sides of the interdigital transducer (2); The interdigital transducer (2) of the structural layer is connected to the external circuit through the high-frequency input electrode (41) and the high-frequency output electrode (42), grounded through the DC ground electrode (45), and connected to the external circuit through the DC bias electrode (44) A DC bias power supply for adjusting the resonant frequency is connected, and the first short-circuit reflection array (31) and the second short-circuit reflection array (32) are both grounded through their respective high-frequency ground electrodes (43) and DC ground electrodes (45). The frequency adjustable surface acoustic wave resonator of the present invention has flexible and convenient frequency adjustment.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical resonators, in particular to a frequency-tunable surface acoustic wave resonator with flexible and convenient frequency adjustment. Background technique [0002] The surface acoustic wave resonator consists of two reflective arrays fabricated on a piezoelectric substrate to form a resonant cavity, and the surface acoustic wave excited by the interdigital transducer placed at an appropriate position in the resonant cavity is reflected back and forth between the two reflective arrays. And form a standing wave to output a resonance signal. The resonant frequency of the resonant signal is determined by the material parameters of the piezoelectric substrate, the structural parameters and material parameters of the interdigital transducer interdigital electrodes and reflective electrodes of the reflective array, as well as the electric load and mass load effects determined thereby, with ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/02
CPCH03H9/02535H03H9/02614
Inventor 赵成陈磊杨义军张凯曾祥华
Owner YANGZHOU UNIV
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