Board-Level Integrated Magnetic Inductive Sensor Based on Surface Acoustic Wave Resonator

Abstract

The invention discloses a board-level integrated magnetic induction sensor based on a surface acoustic wave resonator, comprising a high-frequency substrate (7), and an acoustic sensor attached to a chip bonding area (75) on the top side of the high-frequency substrate (7). The surface wave resonator chip and the planar magnetic induction coil (71) etched on the other side of the top surface of the high-frequency substrate (7) also include a plurality of metal film wires etched on the bottom surface of the high-frequency substrate (7); The inner and outer ends of the planar magnetic induction coil (71) are respectively connected to the voltage regulation electrode layer of the surface acoustic wave resonator and the DC ground electrode on the high-frequency substrate through the metal film wire, the metal through hole, the DC electrode and the bonding wire (9). connected. The board-level integrated magnetic induction sensor based on the surface acoustic wave resonator of the present invention is convenient for realizing digital collection and processing of magnetic induction signals, and is flexible and convenient to adjust.

Description

technical field [0001] The invention belongs to the technical field of magnetic induction sensors, in particular to a board-level integrated magnetic induction sensor based on a surface acoustic wave resonator. Background technique [0002] Magnetic sensors are used to sense magnetic field strength and then detect physical parameters such as current, position, and direction. Magnetic induction sensors have been widely used in various fields of social development and human life, such as industrial automation, aerospace technology, military engineering, environmental monitoring, security, and medical treatment. diagnosis etc. [0003] Magnetic induction sensors in the prior art include reed switches, current sensing transformers, open-loop and closed-loop Hall elements, and fluxgate sensors (patent 201480016300.7; patent 201510273729.0). The disadvantages of traditional magnetic sensors are discrete structures and large volumes. , the dynamic range is small, and the measureme...

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Problems solved by technology

[0004] However, the output physical quantities of the above-mentioned various magnetic induction sensors are mostly analog quantities such as current, voltage, and magnetoresistance, which are not convenient for digital acquisition and processing of output signals.

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