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Piezoelectric film sensor with elliptical flexible substrate

A flexible substrate and piezoelectric film technology, applied in the field of sensors, can solve the problems of inconvenient production of sensor substrates, and achieve the effects of miniaturization and arraying, small size and high sensitivity

Active Publication Date: 2018-03-23
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] A large number of studies have shown that the sensitivity of PVDF piezoelectric sensors with curved substrates is higher than that of flat substrates; ZL201110433976.4 discloses that the sensitivity of PVDF piezoelectric sensors is higher when the substrate curvature is large, but the sensor substrate of this patent is only a single The semicircular base of curvature; Lu Weihu of Jinan University published in the article "High Sensitivity Electronic Stethoscope Based on PVDF Non-uniform Curvature Radius Structure" in Test Science and Instruments 2016, 7 (1), splicing three pieces of silica gel with different curvature radii A curved substrate, which makes it difficult to fabricate the sensor substrate

Method used

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  • Piezoelectric film sensor with elliptical flexible substrate
  • Piezoelectric film sensor with elliptical flexible substrate
  • Piezoelectric film sensor with elliptical flexible substrate

Examples

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Embodiment 1

[0037] Example 1: When the arc length L is fixed, for the semi-elliptical base, the value of a can be uniquely determined according to the value of b. According to the semi-ellipse arc length formula: L=πb+2(a-b); so the major axis can be obtained as:

[0038] If the lengths L of the PVDF piezoelectric film are 2π, 3π, 4π, and 5π (unit: mm), respectively, the value ranges of the major axis a and minor axis b of the semi-ellipse base for each arc length are shown in Table 1. When the PVDF piezoelectric film with the corresponding arc length is covered on the substrate with different long and short axes, when the top of the sensor is subjected to a concentrated force of 1N, the open circuit voltage of the sensor is as follows: figure 2shown. The leftmost point of each curve is a plane base when b=0, the rightmost point is a semicircle base when a=b, and the remaining points are ellipses. Depend on figure 2 It can be seen that in each case of equal arc length, the sensitiv...

Embodiment 2

[0042] Embodiment 2: The present invention has produced three kinds of size ellipse flexible substrate piezoelectric sensors, and the major and minor axis parameters are as shown in Table 2, in image 3 The positions of the three sensors on the corresponding curves are marked in . And three kinds of piezoelectric film sensors are used to measure human pulse, the piezoelectric film sensor 5 is connected with the charge amplifier 6, and the charge amplifier 6 is connected with the oscilloscope 7. The piezoelectric film sensor 5 is placed on the wrist of the human body, the human pulse force 4 is applied to the piezoelectric film sensor 5 , and finally the pulse wave pattern is obtained on the oscilloscope 7 . The human pulse measured by the three sensors recorded by the oscilloscope 7 is as follows: Figure 5-7 As shown in Fig. 1, and filtered the pulse graph, by comparing the graphs before and after filtering, it can be found that the waveforms measured by the three sensors ar...

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Abstract

The invention belongs to the technical field of sensors and provides a piezoelectric film sensor with an elliptical flexible substrate. The piezoelectric film sensor comprises a piezoelectric film, aflexible substrate and an insulating protective layer. The flexible substrate of the piezoelectric film sensor is semi-elliptic cylindrical curved structure. The piezoelectric film covers the flexiblesubstrate and is fixed through the insulating protective layer. According to the flexible substrate structure, sensors are divided into an equal-arc-length ellipse elliptic flexible substrate sensorand an equal-chord-length elliptical flexible substrate sensor. According to the piezoelectric film sensor, through simulating and calculating output voltage of piezoelectric film sensors with semi-elliptical flexible substrates of different size parameters under the same action force, and an optimal flexible substrate size is determined, which means that the output voltage is taken as a basis ofdetermining the sensor flexible substrate size. The piezoelectric film sensor has higher sensitivity, and the miniaturization and arraying of sensors are facilitated.

Description

technical field [0001] The invention belongs to the technical field of sensors, and relates to a polyvinylidene fluoride piezoelectric film sensor with an elliptical flexible substrate. Background technique [0002] Polyvinylidene fluoride (PVDF) piezoelectric film is a new type of high-strength polymer, which can induce electric charge when it is deformed by tension and compression, and has excellent piezoelectric properties; PVDF piezoelectric film is soft, and the common thickness is 20 μm to 200 μm Within the range, it can be made into any shape according to the needs, and is suitable for large-scale array sensors; the acoustic impedance coefficient is low, close to pure water and human muscles, and it fits well with the human body, which is very suitable for monitoring human physiological signals sensor. PVDF piezoelectric film sensors have been widely used in industrial automation, instrumentation, medical electronics, electroacoustics, underwater acoustics, structura...

Claims

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Application Information

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IPC IPC(8): G01D5/12
CPCG01D5/12
Inventor 董维杰赵昕白凤仙
Owner DALIAN UNIV OF TECH
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