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Non-contact power supply system

A power supply system, non-contact technology, applied in the direction of circuits, electrical components, circuit devices, etc., can solve the problems of complex device configuration, increased power consumption of power receiving circuit units, and high cost, so as to realize power consumption and omit communication equipment Effect

Inactive Publication Date: 2018-03-27
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Here, in the above-mentioned conventional example, although wireless communication is performed between the first and second control mechanisms, for example, to perform electrostatic adsorption or release to the workpiece of the robot hand, if the communication device is provided separately, not only the device The configuration becomes complicated, and the power consumption of the power receiving circuit unit also increases, leading to disadvantages such as high cost

Method used

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Examples

Experimental program
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Effect test

Embodiment Construction

[0014] Hereinafter, an embodiment of the non-contact power supply system PS of the present invention will be described with reference to the drawings, taking as an example a case where the power supply target electrode is the suction electrode of an electrostatic chuck provided on the robot hand of the transport robot Tr.

[0015] refer to figure 1 , Tr is a so-called frog-leg transport robot equipped with the non-contact power supply system PS of the present invention. The transfer robot Tr is arranged in a transfer chamber of a vacuum processing apparatus having, for example, a plurality of processing chambers, transfers a wafer W to be processed between the processing chambers, and is concentrically arranged and rotationally driven by a drive source not shown. The two rotating shafts 1a, 1b; the robot arm 3 which is respectively connected to the rotating shafts 1a, 1b and has a robot hand 2 at the end. In addition, the robot hand 2 is provided with adsorption electrodes 4 ...

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Abstract

Provided is a non-contact power supply system which can also perform communication while performing non-contact power supply without using a separate communication device. The power supply system (PS)comprises: a capacitor (5) that is mechanically separated between a pair of electrodes (5a, 5b); a power supply circuit unit (6) that is connected to one electrode of the capacitor; and a power receiving circuit unit (7) that is connected to the other electrode of the capacitor. The power supply circuit unit has an oscillator (61), a modulator (62) for adding amplitude modulation, and a first control means (63) that constitute a series resonance circuit together with the capacitor, and the power supply circuit unit supplies carrier waves modulated to different amplitudes to the one electrodeof the capacitor. The power receiving circuit unit has a rectification circuit (72), a switching circuit (73) that selectively applies a direct current voltage to power supply target electrodes (4a, 4b), and a second control means (75). The second control means controls the operation of the switching circuit on the basis of a control signal carrier wave that is supplied while a power supply carrier wave is being supplied.

Description

technical field [0001] The present invention relates to a non-contact power supply system, and more specifically, to a system for supplying power to the suction electrode in a non-contact manner by using a power supply object electrode as an adsorption electrode of an electrostatic chuck provided on a robot hand of a transport robot . Background technique [0002] Such a contactless power supply system is known from Patent Document 1, for example. If the system of this patent document 1 is described as an example in which a so-called frog-leg transfer robot supplies power in a non-contact manner to an adsorption electrode provided on its robot hand, it has: A separate capacitor; a power supply circuit unit connected to one of the electrodes; a power receiving circuit unit connected between the other electrode and the adsorption electrode. In this case, one electrode of the capacitor is constituted by a cylindrical member provided concentrically with the rotating shaft, and...

Claims

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Application Information

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IPC IPC(8): H02J50/05B25J15/06B25J19/00B65G49/07H01L21/677
CPCH02J50/005H02J50/12H02J7/02B25J15/06B25J19/00B65G49/07H01L21/677H02J50/05B25J19/0045B25J19/06
Inventor 铃木杰之川久保大辅南展史武者和博
Owner ULVAC INC