Non-contact power supply system
A power supply system, non-contact technology, applied in the direction of circuits, electrical components, circuit devices, etc., can solve the problems of complex device configuration, increased power consumption of power receiving circuit units, and high cost, so as to realize power consumption and omit communication equipment Effect
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[0014] Hereinafter, an embodiment of the non-contact power supply system PS of the present invention will be described with reference to the drawings, taking as an example a case where the power supply target electrode is the suction electrode of an electrostatic chuck provided on the robot hand of the transport robot Tr.
[0015] refer to figure 1 , Tr is a so-called frog-leg transport robot equipped with the non-contact power supply system PS of the present invention. The transfer robot Tr is arranged in a transfer chamber of a vacuum processing apparatus having, for example, a plurality of processing chambers, transfers a wafer W to be processed between the processing chambers, and is concentrically arranged and rotationally driven by a drive source not shown. The two rotating shafts 1a, 1b; the robot arm 3 which is respectively connected to the rotating shafts 1a, 1b and has a robot hand 2 at the end. In addition, the robot hand 2 is provided with adsorption electrodes 4 ...
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