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Vacuum drying cavity and vacuum drying device

A vacuum drying device and vacuum drying technology, which is applied in the direction of drying solid materials, drying solid materials without heating, drying, etc., can solve the problems of poor film thickness uniformity of the substrate film

Active Publication Date: 2018-04-20
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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Problems solved by technology

[0005] The embodiment of the present invention provides a vacuum drying chamber and a vacuum drying device, which can solve the problem of judging and adjusting the evaporation rate of the organic solvent in the substrate film layer according to the vacuum degree of the detection environment in the existing vacuum drying device, resulting in the drying of the substrate film The problem of poor film thickness uniformity of the layer

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  • Vacuum drying cavity and vacuum drying device

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0030] An embodiment of the present invention provides a vacuum drying chamber, such as figure 1 As shown, it includes a vacuum chamber 10 and a stage 20 and a condensation plate 30 oppositely arranged in the vacuum chamber 10. The stage 20 is used to carry a substrate 21 to be dried, and the temperature of the surface of the condensation plate 30 is lower than that of the table surface of the stage. Temperature, the surface of the film layer 22 to be dried on...

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Abstract

The invention provides a vacuum drying cavity and a vacuum drying device, relates to the technical field of organic solution film formation, and can solve the problem of weak film thickness uniformityof dried substrate film layers caused by adjustment and judgment of the evaporation speed of organic solvent in the substrate film layers according to detected environmental vacuum degree in a traditional vacuum drying device. The vacuum drying cavity comprises a vacuum cavity, and a carrying table and a condensation plate oppositely arranged in the vacuum cavity; the carrying table is used for bearing substrates to be dried; the plate surface temperature of the condensation plate is lower than the table surface temperature of the carrying table; the surfaces of films layers to be dried of the substrates to be dried are towards the condensation plate; and an organic solvent concentration detector is arranged in the vacuum cavity.

Description

technical field [0001] The invention relates to the technical field of organic solution film formation, in particular to a vacuum drying chamber and a vacuum drying device. Background technique [0002] With the development and progress of display technology, for existing display devices, organic light emitting diode (Organic Light Emitting Diode, OLED) is a current-mode light-emitting device, because it is different from TFT-LCD (hin Film Transistor Liquid Crystal Display (thin film transistor liquid crystal display device) has the advantages of self-illumination, fast response, wide viewing angle, high brightness, bright color, thin and light volume, etc., and is more and more used in the field of high-performance display. [0003] For large-size OLED display devices, the way of using white light OLED with color filter substrate to realize OLED color display has low utilization rate of materials and high power consumption, which makes people more and more inclined to use i...

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Application Information

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IPC IPC(8): F26B5/06F26B25/00
CPCF26B5/06F26B25/00
Inventor 贾文斌廖金龙彭锐叶志杰王欣欣王辉锋
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD
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