This invention discloses a wound-type PLD
target surface consumption measurement and scanning compensation device and method, belonging to the technical field of
pulsed laser deposition equipment and high-temperature superconducting coated conductor preparation. The device includes a
pulsed laser deposition cavity, a target material, a target material motion module, a
laser scanning module, a
target surface three-dimensional measurement module, and a control module. The control module calculates local consumption depth, slope, groove parameters, and consumption uniformity parameters based on the initial and current
target surface height distribution, and generates
laser scanning compensation parameters accordingly. The
laser scanning module adjusts the scanning trajectory, speed, frequency,
pulse number, or dwell time accordingly; the target material motion module synchronously adjusts rotation, oscillation, or translation parameters to ensure the laser action area avoids over-consumption areas or increases the frequency of action on under-consumption areas. This invention enables quantitative judgment of target surface consumption parameters and solves the problem of difficulty in timely identification of local pits, grooves, or tilts on the target surface.