A micro-nano metal structure realizing asymmetric transmission and its preparation method
An asymmetric transmission, metal structure technology, applied in the field of electromagnetic wave polarization state regulation, can solve the problem of low asymmetric transmission efficiency, and achieve the effects of simple and convenient preparation method, simple structure and easy preparation
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Embodiment 1
[0056] Such as figure 2 (b) The micro-nano metal structure that realizes asymmetric transport is shown by figure 2 (c) Multiple periodic units with the same structure are connected up and down, left and right, and all the periodic units are located on the same plane; each periodic unit is 400nm long × 400nm wide. Each periodic unit contains a structural unit; the structural diagram of each structural unit is as follows figure 2 As shown in (a), the structural unit is a single-layer structure with equal length of 330nm and width of 270nm.
[0057] The structural unit includes horizontal body I1, horizontal body II2, horizontal body III3, horizontal body IV4 and vertical body 5. The ends of horizontal body I1, horizontal body II2, horizontal body III3 and horizontal body IV4 are arranged in sequence from top to bottom 5 are vertically connected, horizontal body I1, horizontal body II2, horizontal body III3, and horizontal body IV4 are equally spaced and parallel to each oth...
Embodiment 2
[0075] After the micro-nano metal structure realizing asymmetric transmission of the present invention is prepared based on Example 1 and the steps, a calculation simulation test is performed by using the three-dimensional finite element method (FEM) calculation software COMSOL Multiphysics.
[0076] Such as figure 2 As shown, set the parameters of the structure a=150nm; d=50nm; w=30nm; b=270nm; h=30nm; px=py=400nm.
[0077]When preparing the structure of this embodiment, after using a pattern generator to set according to the above structure, the structure pattern is exposed with an electron beam, and the rest of the steps are the same as the preparation method in Example 1.
[0078] The polarization conversion transmission spectrum of the micro-nano metal structure that realizes asymmetric transmission prepared in this example is as follows: Figure 6~Figure 7 As shown, it can be seen that T+- is a valley mode at 1560 nm, which reaches the minimum value of polarization con...
Embodiment 3
[0084] In the micro-nano metal structure for asymmetric transmission in this embodiment, only the length a of the horizontal body is changed, and other parameters remain unchanged, which are the same as in Embodiment 2. In the structure of this embodiment, the lengths of the horizontal bodies are a=90nm, 120nm, and 150nm, and d=50nm.
[0085] The transmission spectrum of the micro-nano metal structure that realizes asymmetric transmission prepared in this example Figure 9 As shown, the conversion rate of the asymmetric transmission of the micro-nano metal structure that realizes the asymmetric transmission of the present embodiment is as follows Figure 10 shown.
[0086] Will Figure 9 , Figure 10 with the comparative example 2 Figure 4 , Figure 5 By comparison, it can be seen that after changing the parameter a, when a=90 nm, when the wavelength λ=1100 nm, the conversion rate of asymmetric transmission AT=6.7%; a=120 nm, when the wavelength λ=1290 nm, The conversio...
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