Preparation method of blue light and ultraviolet light led chip
An LED chip and ultraviolet light technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of difficult packaging and poor reliability, and achieve the effect of reducing the cost of LEDs, improving the integration, and flexibly adjusting the color temperature.
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Embodiment 1
[0059] See figure 1 , figure 1 A flow chart of a method for preparing a blue light and ultraviolet light LED chip provided by an embodiment of the present invention, the preparation method includes:
[0060] (a) select a sapphire substrate;
[0061] (b) making a blue light epitaxial layer on the upper surface of the sapphire substrate;
[0062] (c) making an ultraviolet light wick groove in the blue epitaxial layer;
[0063] (d) making an ultraviolet light epitaxial layer in the ultraviolet light wick groove;
[0064] (e) forming electrodes on the blue epitaxial layer and the ultraviolet epitaxial layer.
[0065] Further, the crystal plane of the sapphire substrate is (0001).
[0066] Further, on the basis of the above-mentioned embodiment, step (b) comprises:
[0067] (b1) growing a first GaN buffer layer with a thickness of 3000-5000 nm on the upper surface of the sapphire substrate at a temperature of 400-600 °C; preferably, the growth temperature of the first GaN buf...
Embodiment 2
[0105] Please refer to Figure 2a ~ Figure 2h , Figure 2a ~ Figure 2h This is a schematic diagram of a preparation method of a blue light and ultraviolet light LED chip according to an embodiment of the present invention. On the basis of the above embodiment, the period of the InGaN quantum well / GaN barrier multiple structure is 10, Al 1-x Ga x N quantum well / Al 1-y Ga y An example where the period of the N-barrier multiple structure is 10 will be described. Specifically, the preparation method comprises the steps:
[0106] The first step, select the sapphire substrate 11, such as Figure 2a shown.
[0107] The second step is to grow a first GaN buffer layer 101 with a thickness of 3000 to 5000 nm on the upper surface of the sapphire substrate 11 at a temperature of 400 to 600 °C; A first GaN stabilizing layer 102 with a thickness of 500-1500 nm is grown on the upper surface of the layer 101; at a temperature of 900-1050° C., a thickness of 200-1000 nm is grown on the ...
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