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Surface roughness measurement method based on auto-correlation value curvature characteristics of interference image

A technology of surface roughness and interference image, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of not solving the relationship between image texture statistical features and surface roughness functions, and the limitations of high-efficiency measurement. Meet the measurement needs, expand the range, and expand the effect of the measurement range

Active Publication Date: 2018-05-22
SOUTHWEAT UNIV OF SCI & TECH
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Problems solved by technology

[0003] In summary, the problems in the prior art are: At present, there are many roughness measurement methods based on laser interferometry and speckle, which can only measure workpieces with large roughness. The problem of the functional relationship of , so that the efficient measurement has certain limitations

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  • Surface roughness measurement method based on auto-correlation value curvature characteristics of interference image
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  • Surface roughness measurement method based on auto-correlation value curvature characteristics of interference image

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[0035] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0036] The present invention combines the advantages of the speckle method and the interferometry method to propose a method for characterizing the roughness based on the curvature characteristics of the autocorrelation value of the interference image, and establishes a functional relationship between the curvature and the roughness, which can measure the roughness that cannot produce speckle The highly reflective smooth surface can also measure rough surfaces that cannot produce interference fringes, expanding the measurement range. There are many modern industrial machining processes, and the samples under the grinding pr...

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Abstract

The invention belongs to the technical field of measurement of roughness or irregularity of surfaces, and discloses a surface roughness measurement method based on auto-correlation value curvature characteristics of an interference image. The method comprises the following steps: removing the noise of the interference image by adopting Gaussian filter pretreatment; calculating second-order statistical characteristics of the image by applying an image auto-correlation analysis method, and extracting out a statistical characteristic curve of 10 pixel offsets in an i direction; concluding the curve change of the statistical characteristic curve under different roughness, and performing polynomial fitting to solve the maximum curvature of the curve; and fitting the functional relation betweenthe maximum curvature of the curve and the change of the roughness by applying a least square method so as to obtain a functional equation of which the curvature changes with the roughness. The methoddisclosed by the invention can measure high-reflection smooth surfaces which can not generate speckles and can measure rough surfaces which can not generate interference fringes, thereby expanding the measurement range; the method can effectively measure high-reflection surfaces with smaller roughness and rough surfaces with larger roughness, thereby expanding the measurement range; and the maximum value of the relative error of a measurement result is 8.6%.

Description

technical field [0001] The invention belongs to the technical field of measuring surface roughness or irregularity, and in particular relates to a surface roughness measurement method based on curvature characteristics of interference image autocorrelation values. Background technique [0002] At present, the existing technologies commonly used in the industry are as follows: The roughness of the workpiece surface is an important evaluation parameter that reflects its surface characteristics. The roughness of the machined workpiece surface seriously affects the performance and service life of the entire set of machinery, and it will also have a great impact on the parts produced by the entire set of equipment, seriously reducing production quality of parts. Surface roughness measurement is very important in the field of mechanical processing. Traditional workpiece surface roughness measurement methods are mainly divided into two types: contact destructive measurement and no...

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Application Information

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IPC IPC(8): G01B11/30
CPCG01B11/30
Inventor 陈念年董振兴范勇巫玲
Owner SOUTHWEAT UNIV OF SCI & TECH
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