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Manufacturing method for molybdenum-niobium target blank

A manufacturing method and target blank technology, which are applied in the field of target sputtering, can solve the problem that the performance of molybdenum niobium target blank needs to be improved, and achieve the effect of improving process performance and mechanical performance.

Inactive Publication Date: 2018-05-25
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the performance of the molybdenum-niobium target blank formed by the existing technology needs to be improved

Method used

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  • Manufacturing method for molybdenum-niobium target blank
  • Manufacturing method for molybdenum-niobium target blank
  • Manufacturing method for molybdenum-niobium target blank

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Embodiment Construction

[0029] There are many manufacturing methods for the target blank. At present, the manufacturing method of the molybdenum-niobium target blank mainly adopts the method of hot pressing and sintering. Specifically, the prepared metal powder is packed in a specific mold, and then placed in a vacuum hot-press furnace. Under vacuum or inert gas conditions, using a press, the upper and lower pressure heads act on the mold. Pressurize until the pressure and temperature reach the set value, then keep it under the set pressure and temperature for a period of time, then cool down with the furnace, and then come out of the furnace to form the required target blank.

[0030] The method needs to design a matching mold according to the size of the molybdenum-niobium target blank. Correspondingly, the size of the molybdenum-niobium target blank is also limited by the size and strength of the mold, which is relatively expensive and easy to wear and tear. In addition, during the hot-press sinte...

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Abstract

The invention provides a manufacturing method for a molybdenum-niobium target blank. The manufacturing method comprises the steps that molybdenum and niobium mixed powder is provided; the cold isostatic pressing process is conducted on the molybdenum and niobium mixed powder, and thus a molybdenum and niobium powder blank material is formed; the molybdenum and niobium powder blank material is putinto a sheath, the sheath is vacuumized so as to be a vacuum sheath, then the hot isostatic pressing process is conducted on the molybdenum and niobium powder blank material, and thus a molybdenum-niobium alloy is formed; and the vacuum sheath is removed, and thus the molybdenum-niobium target blank is obtained. The cold isostatic pressing process is adopted firstly to pre-form the molybdenum andniobium mixed powder into the semi-dense molybdenum and niobium powder blank material, and therefore better densifying of the subsequent hot isostatic pressing process is facilitated; and then omni-directional gas pressure equal in various directions is applied to the vacuum sheath through the hot isostatic pressing process, and accordingly the sputtering coating molybdenum-niobium target blank which has the density of 99.5% or above and is more uniform in internal organizational structure is obtained.

Description

technical field [0001] The invention relates to the field of target material sputtering, in particular to a method for manufacturing a molybdenum-niobium target blank. Background technique [0002] Sputtering technology is one of the commonly used processes in the field of target sputtering. With the increasing development of sputtering technology, sputtering targets play an increasingly important role in sputtering technology. The sputtering target is mainly composed of a target blank and a back plate, and the quality of the target blank directly affects the film-forming quality of the sputtering target. [0003] Molybdenum-niobium alloy is currently the most commonly used target blank material. The refractory metal molybdenum-niobium alloy has the characteristics of high hardness and stable performance. Niobium target blanks have been widely used in high-strength and wear-resistant industries such as metal coatings and magnetic storage materials. In order to ensure the ...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/14C22C27/04C22C1/04B22F3/04B22F3/15
CPCB22F3/04B22F3/15C22C1/045C22C27/04C23C14/14C23C14/3414
Inventor 姚力军潘杰相原俊夫王学泽段高林
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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