Atmospheric plasma processing device assisted by numerical control grinding and polishing

Abstract

The invention relates to an atmospheric plasma processing device assisted by numerical control grinding and polishing. The problems that secondary adsorption of secondary attachments on the surface exists, the surface quality of an optical element is lowered, and the machining efficiency is low in the existing atmospheric plasma processing process are solved. According to the technical scheme, theatmospheric plasma processing device comprises an electric arc plasma torch jet spray gun, and the electric arc plasma torch jet spray gun and a numerical control flexible grinding head are arrangedon a symmetrical rotary tool on a multi-dimensional motion control console, and are located on the upper surface of an optical element to be machined; and the electric arc plasma torch jet spray gun comprises a plasma source spray gun and an auxiliary airflow ring which are connected up and down; and an air distribution box is arranged in the auxiliary airflow ring, the air distribution box is connected with an air ring gas outlet hole at the lower end of the auxiliary airflow ring and a high-pressure inert gas inlet at the upper end of the auxiliary airflow ring, and a plasma nozzle is arranged on the air ring air outlet hole of the lower end face of the auxiliary airflow ring; the numerical control flexible grinding head comprises a swing shaft, a connecting shaft and a grinding and polishing disc, wherein the swing shaft, the connecting shaft and the grinding and polishing disc are connected in sequence; and a self-transmission motor and a deflection motor are arranged on the swingshaft.

Description

technical field [0001] The invention relates to the technical field of ultra-smooth precision machining on the surface of optical elements, in particular to an atmospheric plasma processing device assisted by numerical control grinding, repairing and polishing. Background technique [0002] The ultra-precision processing technology whose main goal is to reduce the surface roughness of optical components is called ultra-smooth surface processing technology, while traditional optical processing is based on the traditional methods of Fancheng method and manual grinding method, the processing efficiency is low and the processing accuracy is difficult to achieve ultra-smooth surface processing requirements. In recent years, the polishing technology represented by numerical control small tools has become an important means of processing ultra-precision optical components, but it is limited by the requirements for small-scale manufacturing error correction. Although the polishing e...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of secondary adsorption of secondary attachments on the surface during the existing atmospheric plasma processing, the serious decline in the surface quality of optical components, and the reduction in processing efficiency

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