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Method for measuring linear temperature and frequency characteristic of LGS surface acoustic wave temperature sensor

A technology of temperature sensor and surface acoustic wave, which is applied in the application field of surface acoustic wave sensor, can solve the problems of increasing the area and complexity of the device, reducing the performance of the resonator, etc., achieving the effect of excellent linear temperature characteristics and expanding the application range

Active Publication Date: 2018-06-12
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

However, the appearance of the opposite mode will reduce the performance of the resonator, and the number of IDT electrodes is more than that of the single-port single-mode SAW resonator, which increases the device area and complexity

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  • Method for measuring linear temperature and frequency characteristic of LGS surface acoustic wave temperature sensor
  • Method for measuring linear temperature and frequency characteristic of LGS surface acoustic wave temperature sensor
  • Method for measuring linear temperature and frequency characteristic of LGS surface acoustic wave temperature sensor

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Embodiment Construction

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0029] The SAW resonator consists of an IDT and two sets of reflective gratings symmetrically distributed on both sides of the IDT. The IDT and the reflective gratings form a resonant cavity, such as figure 1 shown.

[0030] Using MESMS photolithography process will figure 1 The graph shown is made on a potassium lanthanum silicate piezoelectric substrate with the Euler angle tangential (0°, 138.5°, 27°), and then a layer of Au electrode is grown on the substrate by electron beam evaporation technology, and the thickness of Au is It is 100-150 nanometers, and then the excess part is peeled off by the glue removal solution, leaving the device pattern, and then the device is heated to 400 ° C and then cooled to age it, thereby making a SAW dual-mode temperature sensor (LGS surface acoustic wave temperature sensor).

[0031] Step 1. Use a high...

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Abstract

The invention belongs to the application field of the surface acoustic wave sensors, and specifically relates to a linear temperature frequency characteristics measurement method of the LGS surface acoustic wave temperature sensor. Firstly, the invention calibrates the LGS surface acoustic wave temperature sensor to obtain the Rayleigh wave mode frequency and the bulk mode frequency f01, f02 at room temperature, first-order temperature frequency coefficients x1 and x2 in two modes, and then utilizes the traditional LGS based Rayleigh wave mode in the same acoustic surface wave resonator and the second order temperature coefficient of the body wave mode, which are nearly equal and have the features of the same environmental variables. The Rayleigh wave model of LGS surface acoustic wave temperature sensor and the resonant frequency f1 and f2 of the body wave mode are obtained through testing, and can calculate the current temperature T. The device expands the application range of the original sensor temperature test without increasing the device area and the device complexity, and the differential frequency has excellent linear temperature characteristics.

Description

technical field [0001] The invention belongs to the application field of surface acoustic wave sensors, in particular to a method for measuring and calculating linear temperature-frequency characteristics of an LGS surface acoustic wave temperature sensor. Background technique [0002] SAW (Surface Acoustic Wave, Surface Acoustic Wave) temperature sensors are divided into delay type SAW temperature sensors and resonant type SAW temperature sensors. SAW resonators only respond to certain frequencies of radio frequency signals, including Rayleigh wave mode frequencies and bulk wave mode frequencies. If the temperature around the device changes, the resonant frequency of the Rayleigh wave mode and the resonant frequency of the bulk wave mode of the SAW resonator will change accordingly. By testing the resonant frequency of the Rayleigh wave mode or the resonant frequency of the bulk wave mode, according to the relationship between temperature and frequency , the size of the su...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/26G01K15/00
CPCG01K11/265G01K15/007
Inventor 彭斌喻恒张万里李凌张文旭
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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