Miniature high-resolution optical fiber displacement sensor

Abstract

The invention relates to a miniature high-resolution optical fiber displacement sensor. A hollow-core microsphere is welded to an end portion of a single-mode optical fiber; a stress relief groove ismachined in the outer surface of the hollow-core microsphere; the stress relief groove is an arc groove; the cross section of the stress relief groove is a rectangular through groove; the groove widthof the stress relief groove ranges from 5 to 30 microns; the center plane of the stress relief groove is perpendicular to the axis of the single-mode optical fiber; and a central angle correspondingto the center line of the inner arc of a curved surface where the stress relief groove is located ranges from 10 to 270 degrees. The miniature high-resolution optical fiber displacement sensor of thepresent invention is tested, and the sensitivity of the sensor can reach -2.3527 nm / micron, and micro-nano-level displacement can be realized. The miniature high-resolution optical fiber displacementsensor of the invention has the advantages of structural compactness, high sensitivity, good stability and the like, and satisfies the requirement of high-resolution strain detection.

Description

Background technique [0001] With the development of science and technology, more fields urgently need precision micro-motion systems for processing and measurement. The flexible support micro-displacement mechanism is a commonly used method for micro-nano-level positioning worktables. In the entire system, the accuracy of the detection part directly affects the accuracy and control performance of the entire system. There is an urgent need for micro-nano-level resolution and miniaturized structures. Micro displacement sensor. Most of the traditional wave detection technologies are based on magnetoelectric, piezoelectric, piezoresistive and other electrical and mechanical sensors. The sheet is pasted on the elastic sensitive element. When the elastic element is subjected to external force, displacement and deformation occur, resulting in stress and strain. The resistance strain sheet converts the stress and strain into the change of resistance, so that the output of the sensor ...

AI Technical Summary

Problems solved by technology

Most of the traditional displacement sensors are "active" devices, which are difficult to meet the fine monitoring and safety requirements in many fields in terms of detection sensitivity, dynamic range, anti-electromagnetic interference, volume size, reusability, and "permanent" use in harsh environments. Storage and transportation needs, for example, high voltage power plants, roads, bridges, etc.

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