Optical path structure of a spatial heterodyne Raman imaging spectrometer

Abstract

The present invention proposes an optical path structure of a spatial heterodyne Raman imaging spectrometer mainly comprising: a collimating lens, a focusing lens, a first Raman filter, a beam splitting prism, two wedge prisms, two blazed gratings, a second Mann filter, aspheric lens, imaging lens group, area detector, stage, beam expander and laser. The Raman light emitted by the sample is focused on the blazed gratings on the two arms of the interferometer after passing through the collimating lens, the focusing lens and the first Raman filter, and then combined by the beam splitting prism to obtain the spatial heterodyne Raman interference light , and finally passed through the second Raman filter, aspheric lens and imaging lens group, and then received by the area array detector. The invention adopts the aspheric lens to effectively improve the collection speed of each frame of heterodyne Raman interference light of the area array detector. The invention realizes the rapid measurement of the Raman spectrum at each position on the surface of the sample to be measured, and has the advantages of high resolution, large luminous flux, wide measurement band range and the like.

Description

technical field [0001] The invention relates to the technical field of spectral analysis instruments, in particular to an optical path structure of a spatial heterodyne Raman imaging spectrometer. Background technique [0002] Raman spectroscopy is a non-destructive and rapid detection method based on the Raman light scattered light generated by the interaction between light and matter. After the incident laser is irradiated to the measured object, it will excite the Raman scattered light which is not suppressed from the frequency of the incident laser and whose frequency is near the incident light. By analyzing the Raman scattered light, information related to the molecular system of the measured object can be obtained. According to the difference of the molecular structure or state of the object, the molecule has its corresponding characteristic Raman spectrum. Raman spectroscopy has the advantages of non-destructive, non-invasive, and no need for sample processing, so R...

AI Technical Summary

Problems solved by technology

However, in the existing Raman spectrometer technology, a focused laser spot is used to irradiate the sample, and the Raman spectrum is measured at a specific position on the sample; if the entire sample surface needs to be measured, one position point after another is required Point-by-point scanning of position points, the disadvantage of this method is that the measurement efficiency is low, and it is not suitable for rapid Raman measurement of the entire surface of the sample

Images