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A Cooling Structure of Grease Lubricated Molecular Pump

A technology of cooling structure and molecular pump, which is applied to components, pumps, and pump components of elastic fluid pumping devices, and can solve problems such as ineffective cooling of bearings, difficulty in maintenance or repair, and weak cooling capacity. To achieve the effect of prolonging service life, high structural stability and uniform distance

Active Publication Date: 2020-07-17
SHANGHAI YUDA IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has weak cooling capacity and cannot effectively cool the bearing. If the grease lubricated bearing fails prematurely, it will be difficult to maintain or repair and the cost will be high. Therefore, designers and developers often use bearings and grease with extremely high performance. Guarantee reliability and life, which undoubtedly increases the cost

Method used

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  • A Cooling Structure of Grease Lubricated Molecular Pump
  • A Cooling Structure of Grease Lubricated Molecular Pump
  • A Cooling Structure of Grease Lubricated Molecular Pump

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Embodiment 1

[0050] This embodiment provides a cooling structure for a molecular pump, such as Figure 1-Figure 7 As shown, it includes a base 1, a motor casing assembly and a bearing seat 4, the bearing seat 4 is arranged under the base 1 and the motor casing assembly, and the motor casing assembly is arranged in the base 1;

[0051] The motor casing assembly includes a motor casing 21, a first cooling water chamber and a water guiding square pipe 22 are arranged inside the side wall of the motor casing 21, and the water guiding square pipe 22 communicates with the first cooling water chamber;

[0052] The side wall of the bearing seat 4 is provided with a second cooling water chamber, and the side wall of the bearing seat 4 is also provided with a water inlet and a water outlet respectively communicating with the second cooling water chamber;

[0053] One end of the water inlet is respectively connected with the water guiding square pipe 22 and the second cooling water chamber; one end o...

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Abstract

The invention provides a grease lubricated molecular pump cooling structure. The grease lubricated molecular pump cooling structure comprises a base seat, a motor shell component and a bearing seat, the bearing seat is arranged under the base seat and the motor shell component, the motor shell component is arranged inside the base seat and comprises a motor shell, the side wall of the motor shellis internally provided with a first cooling water cavity and a water guide square tube, the water guide square tube communicates with the first cooling water cavity, the side wall of the bearing seatis internally provided with a second cooling water cavity, the side wall of the bearing seat is further provided with a water inlet and a water outlet which communicate with the second cooling water cavity correspondingly, one end of the water inlet is connected with the water guide square tube and the second cooling water cavity correspondingly, and one end of the water outlet is connected with the first cooling water cavity and second cooling water cavity correspondingly. The grease lubricated molecular pump cooling structure is used for cooling novel molecular pumps, the watercourse sealingperformance is good, the cooling efficiency is high, structural materials and machining methods ensure that the residual stress is small, the structural stability is high, the accuracy stability at abearing is guaranteed, and the reliability is high.

Description

technical field [0001] The invention relates to the field of vacuum equipment, in particular to a cooling structure of a grease lubricated molecular pump. Background technique [0002] The molecular pump is used as a vacuum acquisition device, and the working speed of the rotor is generally as high as tens of thousands of revolutions per minute. The high-speed operation of the rotor is provided by a high-speed motor. A large amount of heat is generated when the high-speed motor is working. At the same time, the bearings at both ends of the main shaft will also generate huge heat due to friction during high-speed operation. After using the temperature range, it will cause its failure, or work at a high temperature for a long time, resulting in a reduction in its life. [0003] Grease-lubricated molecular pumps are favored by users because of their clean interior, high cost performance compared with magnetic levitation molecular pumps, and 360° omnidirectional installation. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D29/58F04D29/056
CPCF04D29/056F04D29/5806F04D29/584
Inventor 宁远涛黄涛陈伟明景加荣黄佳荣陈琦张延顺
Owner SHANGHAI YUDA IND