Resonance type magnetic sensor sensitive unit and digital frequency output magnetic sensor

A technology of magnetic sensor and sensitive unit, which is applied in the direction of magnetic field measurement and magnetic field size/direction by using electromagnetic devices, which can solve the problems of reducing the transmission efficiency of magnetostrictive stress, and achieve the effects of low cost, high sensitivity and high sensitivity

Active Publication Date: 2018-06-26
NANJING UNIV OF SCI & TECH
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Problems solved by technology

However, the magnetic sensitive unit of the magnetic sensor only includes a magnetostrictive unit combined with a resonator. Due to the asymmetry of the composite structure, the magnetostrictive stress generates a moment during the transmission process, resulting in bending deformation of the entire structure, which greatly reduces the Transfer efficiency of magnetostrictive stress

Method used

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  • Resonance type magnetic sensor sensitive unit and digital frequency output magnetic sensor
  • Resonance type magnetic sensor sensitive unit and digital frequency output magnetic sensor

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Embodiment

[0021] combine figure 1 , in this embodiment, the sensitive unit structure 5 of the digital frequency output resonant magnetic sensor includes two upper and lower magnetostrictive units 1 , four quartz spacers 2 and one quartz resonator 3 .

[0022] The quartz resonator 3 is a double-beam quartz tuning fork fixed at both ends, and there are electrode pads at both ends of the tuning fork for connecting to an external oscillating circuit. The quartz resonator 3 works in the bending vibration mode, and the vibration directions of the two beams are symmetrical and opposite. The electrode configuration and preparation method can be found in the literature (Kenji Sato, Atsushi Ono, et al. Experimental Study of GyroSensor Using Double-Ended Tuning Fork Quartz Resonator, 2004 IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference, pp.575-578.) or other electrode configurations that can generate symmetrical opposite bending vibration mod...

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Abstract

The invention provides a resonance type magnetic sensor sensitive unit and a digital frequency output magnetic sensor. The magnetic sensor sensitive unit includes a high-Q value resonator, and magnetostrictive units disposed at the upper side and lower side of the high-Q value resonator respectively; the magnetostrictive units generate magnetostrictive stress under the action of magnetic fields and load the stress onto the high-Q value resonator; insulating spacers are disposed between the high-Q value resonator and the magnetostrictive units; and the stress generated by the magnetostrictive units is loaded to the high-Q value resonator through the transmission of the insulating spacers. The magnetic sensor sensitive unit of the invention can be used for high-sensitivity detection of static, quasi-static and low-frequency magnetic fields, and is small in size and low in cost.

Description

technical field [0001] The invention relates to a resonant magnetic sensor structure, in particular to a resonant magnetic sensor sensitive unit structure with digital frequency output. Background technique [0002] Traditional commonly used magnetic sensors mainly include Hall sensors, fluxgate magnetic sensors, magnetodiode magnetic sensors, magnetotransistor magnetic sensors, nuclear magnetic resonance magnetic sensors, giant magnetoimpedance sensors, electromagnetic induction magnetic sensors, etc. The output of the above-mentioned magnetic sensor is a relatively weak analog signal, which requires complex circuits and methods such as low-noise signal amplifiers, filters, A / D converters, and digital signal processors to process the sensing signals, and the anti-interference ability is not strong [0003] The invention patent application with the application number 201510924509.X proposes a high-Q resonant magnetic sensor with frequency conversion output. This resonant mag...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/06
CPCG01R33/06
Inventor 卞雷祥文玉梅李平
Owner NANJING UNIV OF SCI & TECH
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