Silicon nitride optical waveguide device and graphene detector integrated chip and manufacturing method thereof

Abstract

The invention is an integrated chip of a silicon nitride optical waveguide device and a graphene detector and a manufacturing method thereof, and its structure includes a silicon nitride vertical coupling grating, a silicon nitride optical waveguide device and a graphene detector; The coupling grating is the optical signal input port, connected to the silicon nitride optical waveguide device; the silicon nitride optical waveguide device processes the optical signal, connects and transmits the processed optical signal to the graphene detector, and the graphene detector light signal for photoelectric conversion. Advantages: 1) A variety of reconfigurable optical signal processing functions can be realized by designing silicon nitride optical waveguide devices with different structures; 2) Graphene detectors have wider light absorption than traditional indium phosphide-based detectors Wavelength range, wider electrical bandwidth; 3) The structure of the device is simple, which can realize the optical signal processing functional unit and chip integrated on a single chip.

Description

technical field [0001] The invention relates to a silicon nitride optical waveguide device and a graphene detector integrated chip and a manufacturing method, belonging to the technical field of integrated microwave optical signal processing. Background technique [0002] Photon technology has outstanding advantages such as wide bandwidth, low transmission loss, anti-electromagnetic interference, and tunability. The combination of photon technology and radio frequency microwave technology has produced microwave photon technology. By modulating radio-frequency microwave signals on lasers, functions such as signal generation, modulation, processing, and long-distance low-loss transmission can be realized at optical frequencies. It is a key technology leading the future communication industry and military fields such as radar and electronic warfare. Microwave photon signal processing is one of the research hotspots. At present, many photon signal processing functions have been ...

AI Technical Summary

Problems solved by technology

[0004] The present invention proposes a silicon nitride optical waveguide device and a graphene detector integrated chip and its manufacturing method, and its purpose is to address the difficulty and high cost of the existing indium phosphide detector and silicon-based optical waveguide device integrated chip process problem, it is proposed to adopt the method of integrating graphene detector and silicon nitride-based optical waveguide device, in which the silicon nitride optical waveguide device processes the optical signal, and the graphene detector performs photoelectric conversion on the processed optical signal, so as to realize a single On-chip integrated optical signal processing functional unit and chip

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