Gas-barrier film
A gas barrier and base film technology, applied in the direction of layered products, etc., can solve the problems of gas barrier property drop, gas barrier layer cracks, base film and gas barrier film stress difference, etc., to achieve excellent gas barrier properties and bending resistance sex high effect
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[0136] Hereinafter, the present invention will be specifically described with examples, but the present invention is not limited to these examples. It should be noted that in the examples, the expression "parts" or "%" is used, and unless otherwise specified, it means "parts by mass" or "% by mass".
[0137] 〔Gas barrier film 1〕
[0138] Prepare "KBフィルム with a thickness of 125nm" TM "(Registered trademark) G1SBF (manufactured by KIMOTO) as a base film.
[0139] In this "KBフィルム TM "G1SBF uses hexamethyldisiloxane (HMDSO) and oxygen as raw materials to form a gas barrier layer.
[0140] The gas barrier layer is used as Figure 5 The manufacturing apparatus having the same configuration as shown was formed under the following film forming conditions.
[0141] (Film forming conditions)
[0142] Raw material gas 1: HMDSO
[0143] Raw material gas 2: oxygen
[0144] Supply amount of raw material gas 1: 50sccm (Standard Cubic Centimeter per Minute)
[0145] Supply amount of raw gas 2: 650sccm...
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Abstract
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