Intelligent online uniformity adjusting system

A technology for adjusting the system and uniformity, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of different product quality, time-consuming and labor-intensive reaction speed, etc., to save labor investment, increase Throughput, the effect of achieving uniformity

Pending Publication Date: 2018-07-31
HEBEI WUHUATIANBAO COATING S & T CO LTD
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Problems solved by technology

[0003] At present, the uniformity of magnetron sputtering coated glass is mostly adjusted by human intervention, which is not only time-consuming and labor-intensive, but also has a slow response speed and inconsistent product quality.

Method used

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Embodiment Construction

[0018] The technical solution of the present invention is described in detail below, it should be pointed out that the technical solution of the present invention is not limited to the implementation manner described in the examples, those skilled in the art refer to and learn from the content of the technical solution of the present invention, on the basis of the present invention The improvement and design carried out above shall belong to the protection scope of the present invention.

[0019] An intelligent online uniformity adjustment system, including: WinCC monitoring computer 1, uniformity comparison computer 3, online detection mechanism 2 and reaction gas control mechanism 4, WinCC monitoring computer 1, used for the monitoring system during the coating process of coated glass 5 The overall operation and signal transmission; the uniformity comparison computer 3, which transmits control instructions; the online detection mechanism 2, measures the lateral uniformity of ...

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Abstract

The invention discloses an intelligent online uniformity adjusting system. The intelligent online uniformity adjusting system comprises a WinCC monitoring computer, a uniformity comparison computer, an online detection mechanism and a reaction gas control mechanism. The reaction gas control mechanism is used for controlling the intake speed and intake amount of a reaction gas. The WinCC monitoringcomputer, the uniformity comparison computer, the online detection mechanism and the reaction gas control mechanism are wirelessly connected. According to the intelligent online uniformity adjustingsystem, it is ensured that the vacuum magnetron sputtering gas distribution amount is precisely adjusted and controlled in time, and automatic online adjustment is realized completely according to thebackground data; the uniformity of coating of the surface of coating glass can be controlled effectively, the manual operation amount can be lowered as well, the labor investment is saved while the high-quality coating is ensured, the speed of glass coating is increased, and the production is increased. The intelligent online uniformity adjusting system is wildly applicable to the automatic production and processing industry.

Description

technical field [0001] The invention relates to the field of vacuum magnetron sputtering artificial intelligence, more specifically, an intelligent online uniformity adjustment system. Background technique [0002] Magnetron sputtering requires the introduction of reactive gas and working gas under high cost and low vacuum, and the ambient pressure forms a glow under the condition of 10-3mbar. After the process gas enters the process chamber, it will be evenly distributed in the process chamber, and each process chamber is equipped with 5-9 adjustable auxiliary gas devices. Since the lateral uniformity of large-area flat glass coating is an important indicator of the product, factors affecting the lateral uniformity of coated glass include target material, target base distance, gas isolation, magnetic field distribution and other factors. [0003] At present, the uniformity of magnetron sputtering coated glass is mostly adjusted by human intervention, which is not only time...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/54
CPCC23C14/35C23C14/54
Inventor 杨宏斌冷庆吉齐丽婧郭仙柳丽丽李忠祥
Owner HEBEI WUHUATIANBAO COATING S & T CO LTD
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