Miniature magnetic capacitance sensor device based on magnetic aggregator and nano magnetic particle composite material

Abstract

The invention discloses a miniature magnetic capacitance sensor device based on a magnetic aggregator and a nano magnetic particle composite material. The miniature magnetic capacitance sensor deviceis composed of an SOI substrate, two magnetic field aggregators, a magnetic-nano-particle-composite-mateiral-based magnetic capacitance sensitive unit, a left metal electrode plate and a right metal electrode plate. The two magnetic field aggregators and the magnetic-nano-particle-composite-mateiral-based magnetic capacitance sensitive unit are arranged on a SiO2 surface after patterning on a toplow-resistant Si part of the SOI substrate; the two magnetic field aggregators are arranged in a left-right symmetric manner; and the magnetic-nano-particle-composite-mateiral-based magnetic capacitance sensitive unit is arranged at the gap between the two magnetic field aggregators. The magnetic nano-particle composite material is made from superparamagnetic nano particles and high-molecular polymer. The left metal electrode plate and the right metal electrode plate are spaced between the magnetic field aggregators and the magnetic-nano-particle-composite-mateiral-based magnetic capacitance sensitive unit. The miniature magnetic capacitance sensor device is suitable for magnetic field measurement on various occasions, especially for magnetic field measurement in high dynamic magnetic field application environments like the deep space, the deep sea, and the deep ground.

Description

technical field [0001] The invention relates to a miniature magnetic sensor, in particular to a miniature magnetocapacitive sensor based on magnetic agglomerators and magnetic nanoparticle composite materials and a manufacturing method thereof. Background technique [0002] The widely existing magnetic fields in deep space, deep sea, and deep ground directly or indirectly reflect the changing law of resource distribution in the space environment. Accurate measurement of magnetic field vector information is an important means to detect and recognize deep space, deep sea, and deep ground. At present, the measurement of the magnetic field vector information is realized by a magnetic sensor. However, the measurement environment of deep space, deep sea, and deep ground has weak magnetic fields, rapid changes in magnetic field components, wide temperature ranges, and the development of miniaturized measurement carriers. Therefore, magnetic sensors are required to have micro volume...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the existing magnetic sensor is not suitable for the magnetic vector measurement of deep space, deep sea, deep ground and other environments, the present invention provides a design and implementation of a miniature magnetocapacitive sensor device based on magnetic concentrators and magnetic nanoparticle composite materials. Manufacturing method

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