Miniature magnetic capacitance sensor device based on magnetic aggregator and nano magnetic particle composite material
A nanocomposite material and magnetic nanoparticle technology, applied in the direction of the size/direction of the magnetic field, can solve the problem that the magnetic sensor is not suitable for magnetic vector measurement, etc., and achieve hysteresis-free measurement range, wide measurement range, and fast response to changes in the magnetic field. Effect
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[0029] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0030] A miniaturized magnetocapacitive sensing device based on a magnetic concentrator and magnetic nanoparticle composite, such as figure 1 , 2 As shown, it includes an SOI substrate 1 , two magnetic field concentrators 2 , a magnetocapacitive sensing unit 3 of magnetic nanoparticle composite material, a left metal electrode plate 4 and a right metal electrode plate 5 .
[0031] Among them, the SOI substrate 1 includes the top layer of low-resistance Si 11, the middle buried layer of SiO 2 12 and underlying Si 13.
[0032] The two magnetic field concentrators and the magnetocapacitance sensing unit of the magnetic nanoparticle composite are located on the SiO after the top layer of the SOI substrate is patterned and etched with low-resistance Si 11 2 12 surfaces; two magnetic field concentrators 2 are symmetrically arranged; magnetic na...
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