An Active Suspension Dual Drive Crane

Abstract

The invention discloses an active-suspension double-drive crown block which mainly comprises a stator portion and a mover portion; the stator portion comprises a frame, an upper permanent magnet biased magnetic bearing, a left permanent magnet biased magnetic bearing, a right permanent magnet biased magnetic bearing, a lower passive suspension permanent magnet and a guide rail; and the mover portion comprises a moving frame, a mover permanent magnet and a baffle plate. Double-edge permanent magnets are arranged on the inner side and the outer side of a winding coil respectively, so that the gap flux density uniformity and the magnetic field intensity are improved; by coupling a drive magnetic flux and a suspension magnetic flux, the magnetic flux utilization ratio is increased; by adoptingtwo kinds of novel permanent magnet biased magnetic bearings, longitudinal and transverse translation control of the moving frame of the crown block is realized; and in addition, by decoupling of anaxial magnetic flux and a transverse magnetic flux, the control accuracy is improved. The active-suspension double-drive crown block provided by the invention has the advantages of high positioning accuracy, large drive force, rapidness in transportation speed, compact structure, capability of active vibration control and the like and is suitable for high-cleanliness working environment of semiconductor transportation and the like.

Description

technical field [0001] The invention relates to a linear transport device for semiconductor FOUP materials, in particular to an active suspension double-drive crane. Background technique [0002] Since the semiconductor process requires avoiding pollution and damage to wafers, it has very high requirements on the cleanliness of the working environment. Therefore, it is necessary to strictly control the number of dust particles in the environment. As a FOUP transmission crane dedicated to semiconductors, its cleanliness during work It is a requirement for product licensing, because the cleanliness of the equipment itself will affect the quality of semiconductor products when working in an environment with high cleanliness, so there is a high requirement for the cleanliness of the semiconductor transportation crane. However, most of the existing transport cranes are track-contact structures. The equipment has friction and wear during operation and needs to be lubricated. The d...

AI Technical Summary

Problems solved by technology

However, most of the existing transport cranes are track-contact structures. The equipment has friction and wear during operation and needs to be lubricated. The dust particles generated during its operation have an adverse effect on the cleanliness of semiconductors, and there is also a transmission efficiency. Disadvantages such as low and slow speed

[0003] An automatic material handling system for a magnetically levitated trolley described in Chinese patent 201320776620.5 uses pure electromagnetic magnetic bearings to realize the suspension and guidance of the mobile device, which has a lot of magnetic flux leakage and low utilization of magnetic flux, resulting in high power consumption and a large amount of heat.

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