A method and device for multi-element magnetron sputtering, a method for preparing metal lithium composite electrodes, and equipment for preparing electrodes
A magnetron sputtering device and magnetron sputtering technology, applied in the field of electrode preparation equipment and multi-element magnetron sputtering, can solve the problems of low production efficiency and complicated process, and achieve high production efficiency, good uniformity, and process simple and fast effect
Active Publication Date: 2021-02-12
成都大超科技有限公司
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[0003] Magnetron sputtering is often used in the process of preparing lithium batteries, but the existing multi-component magnetron sputtering method is to first sinter the target into a mixed target and then perform magnetron sputtering, which has a complicated process. The disadvantage of low production efficiency
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[0030] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0031] Please refer to figure 1 , The first embodiment of the present invention provides a multivariate magnetron sputtering device 10, the multivariate magnetron sputtering device 10 includes a plurality of target positions 11, a plurality of guide tubes 13, a magnetron sputtering chamber 15 and a substrate The stage 17 , the plurality of target positions 11 , the plurality of guide tubes 13 and the substrate stage 17 are all accommodated in the magnetron sputtering chamber 15 . The plurality of target positions 11 are used to install a variety of targets, and one end of the plur...
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The invention relates to the technical field of lithium batteries, in particular to a method and device for multi-element magnetron sputtering, a method for preparing metal lithium composite electrodes, and equipment for preparing electrodes. The method and device for multi-element magnetron sputtering, the method for preparing metal lithium composite electrodes, and the equipment for preparing electrodes of the present invention can simultaneously carry out sputter coating of various targets, and can be set according to the sputtering speed of each target. To obtain thin films with different atomic ratio components, when sputtering is required to obtain thin films with different components, the target can be replaced directly. The process is simple and fast, and the production efficiency is high, which meets the needs of mass production.
Description
【Technical field】 [0001] The invention relates to the technical field of lithium batteries, in particular to a method and device for multi-element magnetron sputtering, a method for preparing metal lithium composite electrodes, and equipment for preparing electrodes. 【Background technique】 [0002] In the 1990s, the invention of safe graphite anodes promoted the large-scale application of lithium batteries in personal electronic devices and other fields. By this century, with the advancement of science and technology, the demand for high-end electronic equipment and electric vehicles is increasing, and lithium batteries based on traditional graphite anodes are gradually difficult to meet the demand. Therefore, the development of energy storage systems with higher energy density is imminent. Among the known battery materials, the lithium metal anode has attracted extensive attention from researchers in related fields due to its large capacity of 3860mAh*g-1 and the most negat...
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IPC IPC(8): C23C14/35C23C14/50
CPCC23C14/352C23C14/50
Inventor 张晓琨税烺
Owner 成都大超科技有限公司