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Positive photosensitive resin composition, display device and pattern forming method thereof

A technology of photosensitive resin and composition, applied in the direction of instruments, optics, optomechanical equipment, etc., can solve the problems of sensitivity, transparency decline, panel productivity and quality decline, circuit width reduction, etc., to achieve excellent sensitivity and excellent resolution rate effect

Active Publication Date: 2018-09-25
DONGJIN SEMICHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For this reason, there is a tendency to increase the height difference of thin film transistors by reducing the width of the circuit and forming a high thickness
In this case, the thickness of the interlayer insulating film applied for flatness increases, but this causes a decrease in sensitivity and transparency, which degrades the productivity and quality of the panel (Panel)

Method used

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  • Positive photosensitive resin composition, display device and pattern forming method thereof

Examples

Experimental program
Comparison scheme
Effect test

Synthetic example 1

[0051] Synthesis Example 1: Preparation of 1,2-quinonediazide compound (A)

[0052] By making 1 mole of 4,4',4"-[cyclohexane-1,1,4-triyl]triphenol (4,4',4"-[cyclohexane-1, 1,4-triyl]triphenol) was condensed with 2.0 moles of 1,2-diazidonaphthoquinone-5-sulfonic acid [chloride] to prepare 4,4',4"-[cyclohexane-1 , 1,4-triyl]triphenol 1,2-diazidonaphthoquinone-5-sulfonate.

[0053] Chemical formula 4:

Synthetic example 2

[0054] Synthesis Example 2: Preparation of 1,2-quinonediazide compound (B)

[0055] By making 1 mole of 4,4',4"-[cyclohexane-1,1,4-triyl]tri[2-methylphenol](4,4',4" represented by the following chemical formula 5 -(cyclohexane-1,1,4-triyl)tris(2-methylphenol)) was condensed with 2.0 moles of 1,2-diazidonaphthoquinone-5-sulfonic acid [chloride] to prepare 4,4 ', 4"-[cyclohexane-1,1,4-triyl]tris[2-methylphenol]1,2-diazidonaphthoquinone-5-sulfonate.

[0056] Chemical formula 5:

Synthetic example 3

[0057] Synthesis Example 3: Preparation of 1,2-quinonediazide compound (C)

[0058] By making 1 mole of 4,4',4"-[cyclohexane-1,1,4-triyl]tri[2,6-dimethylphenol](4,4' represented by the following chemical formula 6 , 4"-(cyclohexane-1,1,4-triyl)tris(2,6-dimethylphenol)) and 2.0 moles of 1,2-diazidonaphthoquinone-5-sulfonic acid [chloride] for condensation reaction To prepare 4,4',4"-[cyclohexane-1,1,4-triyl]tris[2,6-dimethylphenol]1,2-diazidonaphthoquinone-5-sulfonic acid ester.

[0059] Chemical formula 6:

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Abstract

The present invention relates to a positive photosensitive resin composition, a display device and a pattern forming method thereof, and more particularly, to a photosensitive resin composition comprising: a) a 1,2-quinone diazide represented by the following formula (1) or (2); b) an acrylic acid copolymer; c) a silane coupling agent; and d) a solvent; wherein R1 in the formula (1) and R3 in theformula (2) each independently represent a hydrogen atom or a 1,2-quinone diazide sulfonate, and R2 in formula (1) and R4 in formula (2) each independently represent a hydrogen atom or a hydrocarbyl group having 1 to 20 carbon atoms, and at least one of R1 and R3 is 1,2-quinone diazide sulfonate.

Description

technical field [0001] The present invention relates to a positive-type photosensitive resin composition (POSITIVE PHOTOSENSITIVE RESINCOMPOSITION), in more detail, relates to having excellent resolution, curing process range, thermal discoloration resistance, heat resistance, etc., especially excellent sensitivity and transparency, And the adhesive force is significantly improved, and it is suitable for forming interlayer insulating films, pixel definition layers (PDL, Pixel DefineLayer), column spacers (Column Spacer), etc. photosensitive resin composition. Background technique [0002] In general, flat panel displays are currently widely used displays, and include various types such as liquid crystal displays (Liquid crystal display: LCD) and organic light emitting diodes (Organic light emitting display: OLED). [0003] In the manufacturing process of a thin film transistor (TFT) type liquid crystal display and an organic light emitting diode, an interlayer insulating fi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/039G03F7/008G03F7/075
CPCG03F7/008G03F7/039G03F7/0751G03F7/0755G03F7/022G03F7/075G03F7/004
Inventor 李相勋尹赫敏吕泰勋黄致容
Owner DONGJIN SEMICHEM CO LTD
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