Common-stator large-stroke cross-scale three-degree-of-freedom parallel motion platform

Abstract

The invention provides a common-stator large-stroke cross-scale three-degree-of-freedom parallel motion platform. The motion platform comprises a base, a working platform, a Y-axis motion system and aZ-axis motion suspension beam assembly; the working platform is arranged on the Z-axis motion suspension beam assembly; and the Z-axis motion suspension beam assembly is arranged on a middle macro-moving component. According to the motion platform, the whole macro-micro motion only needs one motor stator, three electric motors, driving sources of two piezoelectric ceramics to move coordinately, so that any combination of and macro-micro switching of the three-degree-of-freedom can be achieved; and each motion component adopts a macro micro common rail mode, a left macro-moving component, themiddle macro-moving component and a right macro-moving component move upwards, a driving structure on the single side is a design structure of a single motor and a common stator, the large-stroke motion can be realized, meanwhile, the high-speed and high-acceleration speed are achieved, and the motion platform realizes horizontal pitching motion.

Description

technical field [0001] The invention relates to the technical field of motion platforms, in particular to a common-stator large-stroke cross-scale three-degree-of-freedom parallel motion platform. Background technique [0002] With the development of science, many application fields such as semiconductor lithography, IC circuit manufacturing and packaging, biomedicine, precision numerical control processing, integrated circuit manufacturing, etc. have put forward higher requirements for precision positioning technology, which requires large travel and high precision. , quick response and so on. However, large stroke and high precision are always a pair of contradictions. It is very important to coordinate the relationship between the two. In practice, one aspect is often sacrificed to achieve high performance on the other. At present, achieving precise positioning while achieving large-stroke motion has become one of the prerequisites and key technologies that urgently need...

AI Technical Summary

Problems solved by technology

[0003] Domestic utility model patent CN20132009404.X discloses a coaxial macro-micro compound linear motion platform device and its precision compensation method. The device can realize real-time detection of platform displacement information to achieve high static and dynamic precision of the platform. However, due to its It is difficult for traditional flexible mechanisms to achieve nanometer precision

[0004] In the fields of traditional precision machining and precision measurement, the motion platform is mostly a simple superposition of several single-axis platforms, with many joint links and motion components, and serious accumulation of motion errors. Most of them are difficult to satisfy multiple degrees of freedom and high precision at the same time. , in addition, the stroke of the platform that realizes high-precision motion control is generally short, and the precision of the feed platform that realizes large stroke cannot meet the actual demand

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