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Preparation method of homoepitaxy MgO thin film based on solution method

A homoepitaxial and solution method technology, applied in liquid chemical plating, metal material coating process, coating and other directions, can solve the problems of high equipment quality requirements, unsatisfactory film structure and morphology, complex process flow, etc. To achieve the effect of excellent surface morphology

Active Publication Date: 2018-11-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the PVD homoepitaxial process is complex and needs to be carried out in a high vacuum environment, so the equipment quality requirements are high, the cost is high, and the film structure and morphology are not ideal (root mean square roughness greater than 3nm)

Method used

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  • Preparation method of homoepitaxy MgO thin film based on solution method
  • Preparation method of homoepitaxy MgO thin film based on solution method
  • Preparation method of homoepitaxy MgO thin film based on solution method

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Embodiment Construction

[0017] The technical scheme of the present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0018] Embodiment: Configure 0.1mol / L magnesium chloride alcohol solution as the precursor of MgO, and use chemical solution deposition method to homoepitaxially layer MgO thin film on the 10m metal substrate coated with IBAD-MgO. Include the following steps:

[0019] Step 1. Weigh 4.6g of 0.02mol magnesium chloride hexahydrate crystals, put them in a blast drying oven and bake at a constant temperature of 90°C for 4 hours;

[0020] Step 2. Pour the solid obtained in step 1 into a 200ml beaker, add absolute ethanol to make the volume to 150ml, put it into an ultrasonic cleaner, and dissolve it ultrasonically for 30 minutes to obtain a clear and transparent solution;

[0021] Step 3. Put the solution obtained in step 2 on a magnetic stirrer in a beaker, put in a stirrer, turn on the heating mode and heat to 40°C, and stir magne...

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Abstract

The invention belongs to the technical field of thin film preparation, and relates to a method for preparing a homoepitaxy MgO thin film on a metal base band plated with IBAD-MgO, in particular to a preparation method of the homoepitaxy MgO thin film based on a solution method. According to the method, the low-cost solution sedimentation method is used for completely replacing a traditional PVD method which is high in cost and complex in technology, and compared with that of the traditional method, the surface appearance of the prepared homoepitaxy MgO thin film is more excellent.

Description

technical field [0001] The invention belongs to the technical field of thin film preparation, and relates to a method for preparing a homoepitaxial magnesium oxide (MgO) thin film on a metal substrate coated with IBAD-MgO, in particular to a method for preparing a homoepitaxial MgO thin film based on a solution method. Background technique [0002] High-temperature superconducting tapes are widely used in many fields such as power transmission, energy storage, and sensors. The biaxially textured MgO buffer layer is one of the important components of the high-temperature superconducting tape; the preparation of the MgO buffer layer with high flatness, good uniformity, and good orientation consistency is the key to the preparation of high-performance YBCO (yttrium barium copper oxide) high-temperature superconducting materials. The premise of conducting tape, the preparation technology of high-quality, low-cost and high-efficiency biaxially textured MgO buffer layer is of grea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/12
CPCC23C18/1216C23C18/1241C23C18/1291
Inventor 陶伯万马寅畅赵睿鹏唐浩苟继涛
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA