High-power focusing optical path system for continuous adjustment of dimension of laser spot, and adjustment method

Abstract

The invention belongs to the field of laser focusing ablation, excitation and ionization optical path systems, and relates to a high-power focusing optical path system for the continuous adjustment ofthe dimension of a laser spot. The system is suitable for a laser spectrometer, a laser mass spectrometer, and a laser inductively coupled plasma spectroscopy or mass spectrometer. The optical path sequentially comprises a beam expanding lens group, a mechanical diaphragm, a tuning lens group, a high-power focusing lens group and a window plate along a propagation track of a beam. The optical total length is 350-700mm, the back focal length is 20-200mm, the external diameter of a lens is 20-25.4mm, and the focusing multiple is greater than 25. The beam expanding lens group performs the two-time expanding of laser, thereby facilitating the subsequent high-power focusing. The spacing between lenses of the tuning lens group is changed, and the size of the mechanical diaphragm is fixed, so the divergence angle of laser can be changed to obtain laser spots in different sizes. The aperture of the mechanical diaphragm is changed, and the spacing between lenses of the tuning lens group is fixed, so the laser spots in different sizes are obtained through the detailed theoretical calculation and actual error restoration, and the adjustable range of the focusing laser spots is 5-600 microns.

Description

technical field [0001] The invention belongs to the field of laser focusing ablation, excitation and ionization optical path systems, and in particular relates to a laser spot size continuously adjustable high-power focusing optical path system and an adjustment method, which are suitable for laser spectrometers, laser mass spectrometers, laser inductively coupled plasma spectroscopy or mass spectrometer. Background technique [0002] Laser focused ablation technology refers to focusing the laser on the surface of the sample. When the energy density of the laser pulse is greater than the breakdown threshold, melting, sputtering, and evaporation can be generated on the surface of the sample while plasma is formed. The fine particles are transported by the gas carrier to the plasma to be atomized and ionized. For example, when combined with inductively coupled plasma mass spectrometry and inductively coupled plasma mass spectrometry, solid samples can be directly analyzed as a...

AI Technical Summary

Problems solved by technology

[0004] In view of the above technical problems, the purpose of the present invention is to provide a laser spot size continuously adjustable high-power focusing optical path system and adjustment method to solve the problem that the traditional method uses a mechanical diaphragm to ablate the spot size is limited and the excitation energy is greatly lost

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