GaAs-based InAs quantum dot material growth method
A quantum dot material and growth method technology, applied in the field of GaAs-based InAs quantum dot material growth, can solve the problems of reduced quantum efficiency in InAs quantum dots, high defect density, poor crystal quality of the low-temperature cap layer, etc., and achieve long atom migration time , crystal quality is good, the effect of improving luminous efficiency
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[0028] In order for those skilled in the art to better understand the technical solutions in the embodiments of the present invention, and to make the above objects, features, and advantages of the embodiments of the present invention more clearly understood, the following describes the technical solutions in the embodiments of the present invention with reference to the accompanying drawings. for further details.
[0029] In the description of the present invention, unless otherwise specified and limited, it should be noted that the term "connection" should be understood in a broad sense. It is directly connected or indirectly connected through an intermediate medium. For those skilled in the art, the specific meanings of the above terms can be understood according to specific situations.
[0030] like figure 1 As shown, the present invention provides a method for growing a GaAs-based InAs quantum dot material, characterized in that it includes:
[0031] S1. Grow a GaAs buf...
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