Bearing machine and its control method
A technology of a carrier and a carrier, which is applied in the manufacture of semiconductor/solid-state devices, electrical components, circuits, etc., can solve the problems of large shadow area of the inorganic layer, affecting the service life of the display panel, and easy entry of external water and oxygen into the display panel. To achieve the effect of increasing the service life
Active Publication Date: 2020-07-28
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] The embodiment of the present invention provides a carrier machine and its control method, which can solve the problem that the shadow area of the inorganic layer is relatively large due to the sagging of the mask in the related art, and the external water and oxygen easily enter the display panel, which affects the use of the display panel. The problem of longevity
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[0042] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments . Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0043] figure 1 A schematic diagram showing the shaded area of the inorganic layer on the glass substrate in the related art, as figure 1 As shown, the first barrier wall 01 and the second barrier wall 02 are arranged on the glass substrate, wherein the first barrier wall 01 is set outside the effective display area of the display panel, and the second barrier wall 02 is set between the first barrier wall 01 outside. The mask plate 0...
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The invention relates to a bearing machine table and a control method thereof, and belongs to the technical field of mechanical equipment. The bearing machine table comprises an adjusting assembly anda bearing table used for bearing a substrate; the adjusting assembly is used for adjusting the curvature degree of the table surface of the bearing table to be the target curvature degree, so that the distance between the substrate and a mask plate arranged above the substrate is within a preset range, and the problem of influence to the service life of the display panel caused by easy entrance of external water and oxygen to the display panel due to the fact that the area of a shadow region of an inorganic layer is relatively large due to the drooping of the mask plate can be solved; the effect of prolonging the service life of the display panel is achieved; and The bearing machine table is used in preparation of the display panel.
Description
technical field [0001] The invention relates to the technical field of mechanical equipment, in particular to a carrying machine platform and a control method thereof. Background technique [0002] The thin film encapsulation process is one of the important processes in the preparation of display panels. When carrying out the thin film packaging process, the glass substrate is usually placed on the carrier platform, the mask plate is fixed above the glass substrate through the mask frame (English: frame), and then the process is carried out on the glass substrate based on the mask plate. Plasma Enhanced Chemical Vapor Deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) operation, so that the plasma passes through the light-transmitting region of the mask to form an inorganic layer on the glass substrate, for example, the inorganic layer includes silicon nitride (SiNx), silicon oxynitride ( SiON) and so on. [0003] In the related art, generally, the area where th...
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IPC IPC(8): H01L21/67
CPCH01L21/67121
Inventor 王世龙蒋志亮
Owner BOE TECH GRP CO LTD