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Detection device for detecting silicon wafer positions, silicon wafer processing system and detection method

A detection device and detection method technology, applied in semiconductor/solid-state device testing/measurement, electrical components, semiconductor/solid-state device manufacturing, etc., can solve the problems that human eyes cannot continuously and stably complete high repeatability and intelligence, etc. Achieve the effect of avoiding visual fatigue, high efficiency and convenient maintenance

Pending Publication Date: 2018-11-23
S C NEW ENERGY TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, usually the human eye cannot complete these highly repetitive and intelligent tasks continuously and stably, so the industry urgently needs to develop a rapid, repeatable and intelligent detection method

Method used

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  • Detection device for detecting silicon wafer positions, silicon wafer processing system and detection method
  • Detection device for detecting silicon wafer positions, silicon wafer processing system and detection method
  • Detection device for detecting silicon wafer positions, silicon wafer processing system and detection method

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Embodiment Construction

[0024] The technical solutions in the embodiments of the present invention will be described in detail and completely below with reference to the drawings in the embodiments of the present invention.

[0025] figure 1 Shown is a schematic structural diagram of a specific embodiment of the detection device of the present invention, including: a driving mechanism, a camera module, a light source, and a distance measuring device.

[0026] The driving mechanism is provided with a square frame 1, and the detection surface of the frame 1 and the graphite boat 5 (such as Figure 4 (shown) match in size, guide rails 11 are provided on two opposite sides of the frame 1, and a middle guide rail 12 is arranged between the two guide rails, a bracket 2 is installed on the middle guide rail, and a camera module and a light source 4 are fixed on the bracket And the distance measuring device, etc., the motor can drive the bracket to move along the middle guide rail and drive the middle guide...

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Abstract

The invention discloses a detection device for detecting silicon wafer positions, a silicon wafer processing system and a detection method. The detection device comprises a camera shooting module, a light source adaptive with the camera shooting module and a driving mechanism for driving the camera shooting module and the light source to move along two orthogonal directions, wherein the driving mechanism is used for moving the camera shooting module to each detection point; and the camera shooting module is used for collecting the images of each detection point and carrying out processing analysis on the images to determine whether wafers are leaked or whether the silicon wafer positions are normal. The detection precision is high, and a great deal of manpower and energy can be saved.

Description

technical field [0001] The invention relates to graphite boat automatic loading and unloading chip machine equipment, in particular to a graphite boat silicon chip detection method and detection system. Background technique [0002] As time goes by, the scarcity of fossil energy will become more and more obvious. In the context of the increasingly tense supply of fossil energy, solar energy, as an inexhaustible renewable energy source for human beings, is of great importance in long-term energy strategies due to its unique cleanliness, absolute safety, and relative universality. influence status. Graphite boat automatic loading and unloading machine is a typical representative of automation equipment in photovoltaic manufacturing industry. In the basket, it has the characteristics of automation and high production efficiency, reduces the contact pollution between manpower and silicon wafers, and greatly increases the stability of picking and placing wafers. It is recognize...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/66
CPCH01L21/67265H01L22/26
Inventor 邓金生何堂贵彭亚萍余仲
Owner S C NEW ENERGY TECH CORP
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