Design of xyθ micro-positioning platform based on non-fixed axis detection method of laser ruler

Abstract

The invention discloses an X-Y-theta micro-positioning platform based on a laser ruler movable shaft detection method. The X-Y-theta micro-positioning platform comprises a base body. The base body isof a cube structure. Two transverse combined parallel leaf spring mechanisms which are symmetrically arranged are arranged inside the base body in the direction of facing each side face of the four side faces. A voice coil motor is connected with the symmetry center of the two transverse combined parallel leaf spring mechanisms on each side face, a rotor of each voice coil motor is connected withthe symmetry center of the two corresponding transverse combined parallel leaf spring mechanisms, and a stator of each voice coil motor is fixedly arranged on a pedestal. The angle between the axes ofevery two adjacent voice coil motors is 90 degrees. Four longitudinal combined parallel leaf spring mechanisms are further arranged inside the base body, and each longitudinal combined parallel leafspring mechanism corresponds to the corresponding pair of transverse combined parallel leaf spring mechanisms and is connected with the corresponding transverse combined parallel leaf spring mechanisms. The junction of the four longitudinal combined parallel leaf spring mechanisms is a platform movement center, and a platform movement portion is installed on the top of the platform movement centerthrough a connecting piece. A displacement detection device is further arranged on the platform movement portion.

Description

technical field

[0001] The invention relates to the technical field of micro-nano positioning, in particular to an XYθ three-degree-of-freedom micro-positioning platform based on a laser ruler non-fixed axis detection method. Background technique

[0002] With the changes of the times, many technologies have emerged. Nowadays, scholars are not limited to the study of the macroscopic world, but also focus on the study of tiny things. Micro-nano positioning technology, as the basic technology for exploring the micro-nano world, has been widely used in precision instruments and machinery. Different from the traditional mechanical transmission system, the micro-nano positioning system generally uses a flexible mechanism to replace the roller screw and the rigidly connected transmission mechanism. The flexible mechanism relies on its own small deformation to complete the transmission of motion, force, and energy, so as to achieve no wear, no backlash, no friction, and high preci...

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