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Design of xyθ micro-positioning platform based on non-fixed axis detection method of laser ruler

A detection method and positioning platform technology, applied in the direction of measuring devices, instrument parts, optical devices, etc., can solve problems such as difficult to achieve stroke detection, increase design requirements and difficulties, and achieve the effect of increasing accuracy and reliability

Active Publication Date: 2020-12-22
SHANDONG UNIV
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Problems solved by technology

These sensors have certain defects, that is, the installation problem of the sensor and the detection range. It is necessary to design a suitable position in the platform to install the sensor, which increases the design requirements and difficulty, and the detection range of the capacitive sensor and the strain sensor is below 2mm, which is difficult to achieve large Stroke detection under deformation

Method used

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  • Design of xyθ micro-positioning platform based on non-fixed axis detection method of laser ruler
  • Design of xyθ micro-positioning platform based on non-fixed axis detection method of laser ruler
  • Design of xyθ micro-positioning platform based on non-fixed axis detection method of laser ruler

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[0037] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0038]It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0039] For the convenience of description, if the words "up", "down", "left" and "right" appear in the present in...

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Abstract

The invention discloses an X-Y-theta micro-positioning platform based on a laser ruler movable shaft detection method. The X-Y-theta micro-positioning platform comprises a base body. The base body isof a cube structure. Two transverse combined parallel leaf spring mechanisms which are symmetrically arranged are arranged inside the base body in the direction of facing each side face of the four side faces. A voice coil motor is connected with the symmetry center of the two transverse combined parallel leaf spring mechanisms on each side face, a rotor of each voice coil motor is connected withthe symmetry center of the two corresponding transverse combined parallel leaf spring mechanisms, and a stator of each voice coil motor is fixedly arranged on a pedestal. The angle between the axes ofevery two adjacent voice coil motors is 90 degrees. Four longitudinal combined parallel leaf spring mechanisms are further arranged inside the base body, and each longitudinal combined parallel leafspring mechanism corresponds to the corresponding pair of transverse combined parallel leaf spring mechanisms and is connected with the corresponding transverse combined parallel leaf spring mechanisms. The junction of the four longitudinal combined parallel leaf spring mechanisms is a platform movement center, and a platform movement portion is installed on the top of the platform movement centerthrough a connecting piece. A displacement detection device is further arranged on the platform movement portion.

Description

technical field [0001] The invention relates to the technical field of micro-nano positioning, in particular to an XYθ three-degree-of-freedom micro-positioning platform based on a laser ruler non-fixed axis detection method. Background technique [0002] With the changes of the times, many technologies have emerged. Nowadays, scholars are not limited to the study of the macroscopic world, but also focus on the study of tiny things. Micro-nano positioning technology, as the basic technology for exploring the micro-nano world, has been widely used in precision instruments and machinery. Different from the traditional mechanical transmission system, the micro-nano positioning system generally uses a flexible mechanism to replace the roller screw and the rigidly connected transmission mechanism. The flexible mechanism relies on its own small deformation to complete the transmission of motion, force, and energy, so as to achieve no wear, no backlash, no friction, and high preci...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00G01B11/02
CPCG01B11/02G12B5/00
Inventor 闫鹏钱佳卫鲁帅帅
Owner SHANDONG UNIV
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