Groove-type MOS device and manufacturing method thereof
A technology of MOS devices and manufacturing methods, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as limited device structure and manufacturing process, reduce on-resistance, and cannot increase device density, etc., to achieve optimization The effect of manufacturing process, reducing on-resistance, and increasing process difficulty
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[0097] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
[0098] see figure 2 , the first embodiment of the present invention relates to a trench type MOS device. It should be noted that the drawings provided in this embodiment are only to illustrate the basic concept of the present invention in a schematic way, so the drawings only show the components related to the present invention rather than the number, shape and the number of components in actual implementation. For dimension drawing, the t...
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