Langmuir probe, Langmuir probe diagnostic system and diagnostic method thereof
A technology of Langmuir probe and diagnostic method, which is applied in the direction of electrical components, plasma, etc., and can solve problems such as large measurement error and collection area error
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[0048] According to one aspect of the present invention, there is provided a Langmuir probe, such as figure 1 as well as figure 2 as shown, figure 1 Schematic diagram of the structure of the Langmuir probe provided for the embodiment of the present invention; figure 2 A sectional view of a bottom view of a Langmuir probe provided for an embodiment of the present invention; including a collector 101, a conductive screw lead 102, a ceramic sheath 103, and a hex nut 104;
[0049] The conductive screw lead 102 is screwed into the collector and connected to the collector 101. The ceramic sheath 103 is sleeved on the conductive screw lead 102, and one end is in contact with the collector 101. The hex nut 104 is screwed to the conductive screw lead 102. connected and abuts against the other end of the ceramic sheath 103 .
[0050] According to the Langmuir probe of the present invention, for the Langmuir probe, the Langmuir probe 10 includes a collector 101, a conductive screw l...
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