Contact or noncontact compound principle based nanometer sensing method and device

Abstract

The invention relates to a contact or noncontact compound principle based nanometer sensing method and a device and belongs to precise sensing and measuring techniques. In the invention, a quantum tunneling principle is adopted for sensing a conductor measured substance, specifically, an aiming clearance of a measured substance and a micro-metering ball is adjusted to a tunneling operating section, and then a generated quantum tunneling effect is adopted for converting the aiming clearance into a sensing signal. A contact detecting principle is adopted for sensing a non-conductor measured substance, and the displacement of the micro-metering ball is transferred to a sensing unit by an elastic transferring mechanism and is converted into a sensing signal after the micro-metering ball is incontact with the measured substance. The invention also provides a compound principle based nanometer sensing device. According to the invention, nanometer resolving power, three-dimensional isotropyand non-contact sensing property are effectively considered when the conductor measured substance is measured, and meanwhile, the non-conductor measured substance also can be measured, and high resolution measurement for high depth-to-width ratio micro-nano / tiny structure can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision sensing and measurement, and mainly relates to a contact or non-contact composite principle nano-sensing method and device. Background technique [0002] With the increasing level of precision machining and manufacturing, micro-nano / micro structures with large aspect ratio features are applied in cutting-edge technology fields, and sensing methods and sensing probes for precision measurement of such structures have become current Research hotspots. High resolution and aiming accuracy, three-dimensional isotropy and non-destructive rapid measurement capabilities are the key elements to realize high-precision measurement of large aspect ratio structures. However, it is difficult to achieve nanoscale high resolution, three-dimensional isotropy, large aspect ratio measurement capability and non-destructive Effective balance of measurement characteristics and high-precision measurement. [0003] A...

AI Technical Summary

Problems solved by technology

The technical characteristics of the sensing technology scheme are: (1) The scheme uses the Schottky radiation effect as the sensing principle, which is a non-contact sensing principle, and can theoretically achieve rapid measurement without damage; (2) The research literature is A preliminary exploration of the principle, the probe is composed of solid metal rods and metal balls directly welded, no complete and specific technical solutions have been given for the measurement of structures with large aspect ratios, and no mechanical structure and signal transmission of the probe have been given and shielding interference, etc., it is impossible to realize the actual engineering measurement of the structure with large aspect ratio; (3) the solution cannot measure the non-conductor DUT

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