Magnetostrictive metal substrate-based magnetic sonar sensor and preparation method thereof

A magnetostrictive, metal substrate technology, applied in magnetostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, instruments, etc., can solve the difficulty of ensuring the consistency of magnetic sonar sensors, structure and preparation process Complex, difficult to adapt to the device and other problems, to achieve the effect of low loss, simple structure, high detection sensitivity

Active Publication Date: 2019-01-11
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Claims
  • Application Information

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Problems solved by technology

These magneto-acoustic sensor devices are formed by mechanical combination, with large volume, complex structure and manufacturing process. At the same time, the mechanical structure couples the underwater acoustic sensor and the magnetic field sensor, which makes it difficult to ensure the consistency of the magnetic sonar sensor,

Method used

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  • Magnetostrictive metal substrate-based magnetic sonar sensor and preparation method thereof
  • Magnetostrictive metal substrate-based magnetic sonar sensor and preparation method thereof
  • Magnetostrictive metal substrate-based magnetic sonar sensor and preparation method thereof

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Embodiment 1

[0051] The preparation method of the magnetic sonar sensor based on the magnetostrictive metal substrate provided by the embodiment, such as Figure 4 shown, including the following steps:

[0052] Step 1. Cleaning:

[0053] Choose 800μm thick Fe 81.3 Ga 18.7 The alloy block is used as the magnetostrictive substrate 1, and its thickness is much greater than twice the wavelength of the surface acoustic wave; 400, 1000, and 3000 mesh sandpaper is used to roughly polish the cut layer on the surface of the magnetostrictive substrate, and the alloy after rough polishing The substrate was ultrasonically cleaned in anhydrous ethanol for 20 minutes, and then polished on the polishing pad with diamond polishing pastes with different particle sizes of 7 μm, 3 μm, and 0.25 μm, and then 50 nm of SiO on the polishing machine. 2 Suspend the polishing solution for polishing for 2 hours. After the polishing is completed, clean the magnetostrictive substrate with absolute ethanol in a high-...

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Abstract

The invention discloses a magnetostrictive metal substrate-based magnetic sonar sensor, and belongs to the technical field of magnetic acoustic detection. The magnetostrictive metal substrate-based magnetic sonar sensor comprises a magnetic field detection part composed of two magnetic acoustic surface wave resonator units and an acoustic pressure detection part composed of 2xN arrayed piezoelectric ultrasonic transducer units; the magnetic acoustic surface wave resonator units and the piezoelectric ultrasonic transducer units share magnetostrictive substrates, metal buffer layers, piezoelectric thin films and protective layers; and the thicknesses of the piezoelectric thin films in the two magnetic acoustic surface wave resonator units are different. The magnetostrictive metal substrate-based magnetic sonar sensor integrates magnetic acoustic surface wave resonators and piezoelectric ultrasonic transducers to realize magnetic field detection and acoustic pressure detection of an underground target such as a ship, a submarine and a UUV (Unmanned Underwater Vehicle), and has the advantages of simple structure, easiness in machining, low cost, high integration degree, high detectionsensitivity, low loss, high response speed and the like.

Description

technical field [0001] The invention belongs to the technical field of magnetoacoustic detection, and in particular relates to a magnetic sonar sensor based on a magnetostrictive metal substrate and a preparation method thereof. The sensor has the functions of magnetic anomaly field and sound pressure detection, and can be used for underwater target detection, Positioning, navigation or other underwater acoustic detection systems. Background technique [0002] In the field of underwater acoustic detection technology, the underwater acoustic sensor is generally composed of a sound pressure underwater acoustic sensor and a sensor that directly or indirectly measures the vibration velocity, and can simultaneously measure the underwater acoustic scalar and vector (sound pressure gradient, particle velocity , acceleration, displacement or sound intensity, etc.) information. The sensing element of the miniature acoustic directional transducer, that is, the piezoelectric ultrasoni...

Claims

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Application Information

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IPC IPC(8): G01S7/521H01L41/12
CPCG01S7/521H10N35/101
Inventor 白飞明姜建利刘力张怀武金立川
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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