Manufacturing method of microchannel device and the microchannel device

A manufacturing method and technology of micro-channels, which are applied in fluid controllers, chemical instruments and methods, and photoplate-making processes on patterned surfaces, etc., can solve the problem of insufficient side wall height of polydimethylsiloxane micro-channels, Insufficient negative pressure suction and other problems, to avoid damage, prevent insufficient negative pressure suction, and increase manufacturing speed

Inactive Publication Date: 2019-01-18
TAIWAN CARBON NANO TECHNOLOGY CORPORATION
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0005] The main purpose of the present invention is to solve the problem that the height of the side wall of the polydimethylsiloxane microfluidic channel is insufficient, resulting in insufficient negative pressure suction

Method used

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  • Manufacturing method of microchannel device and the microchannel device
  • Manufacturing method of microchannel device and the microchannel device
  • Manufacturing method of microchannel device and the microchannel device

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Embodiment Construction

[0022] Relating to the detailed description and technical contents of the present invention, it is now described as follows with regard to the accompanying drawings:

[0023] see Figure 1 to Figure 4 As shown, the present invention is a method of manufacturing a micro-channel device and its structure. The micro-channel device 40 has a micro-channel structure 41 and its side wall height is between 3 millimeters and 30 millimeters, and its manufacture The method includes the following steps:

[0024] S1: if Figure 3A As shown, a mold 10 is provided, the mold 10 is made of glass material, and has a hollow mold cavity 11 and a retaining wall 12 surrounding the hollow mold cavity 11, and the retaining wall 12 has a thickness of not less than 3 mm the height h.

[0025] Wherein, the manufacturing method of the mold may be to use laser processing to process the glass to form the mold 10, so that the mold 10 has the hollow mold cavity 11 and the retaining wall surrounding the hol...

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Abstract

A manufacturing method of a microchannel device and the microchannel device. A mold made of a glass material is provided. The mold has at least one hollow mold cavity and at least one blocking wall around the hollow mold cavity. The mold is disposed on a silicon substrate, which includes a formation surface corresponding to the hollow mold cavity and a microfluidic male mold protruding from the formation surface. Polydimethylsiloxane (PDMS) is poured into the hollow mold cavity and baked to harden the PDMS to form the microfluidic device. The microfluidic device has a microfluidic structure corresponding to the microfluidic male mold, and a height of a sidewall of the microfluidic device is between 3 mm and 30 mm. With the glass material of the mold, the microfluidic device having a sidewall height greater than 3 mm can be manufactured, preventing an insufficient suction force of a negative pressure.

Description

technical field [0001] The invention relates to a micro-channel device, in particular to a manufacturing method and structure of the micro-channel device. Background technique [0002] With the vigorous development of semiconductor technology and biotechnology, the microchannel reactor developed by combining microstructure manufacturing technology and biomedical detection technology is an important technical means to improve the quality of reaction products and improve process efficiency, and has been widely used. Widely used in chemical, material and pharmaceutical fields, it is an essential product in related fields. [0003] And the application of microfluidic channel is " microfluidic chip and its using method " of Chinese Taiwan Patent Announcement No. I421340, and it comprises a base material and at least one tissue culture zone, and this base material has a surface, and this at least one tissue culture area area, formed on the surface of the substrate, and the tissue...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/00
CPCB01J19/0093B01L3/502707B01L2300/0816B01L2300/12B29C33/38B29C33/3842B29C33/58B29C33/60B29C39/003B29C39/026B29K2083/00B29K2883/00B29K2909/08B29L2031/756B01L2200/06B01L2400/0487B29K2907/00G03F7/0017
Inventor 廖育萱蔡芳松吴雅涵蔡群贤李庭鹃蔡群荣
Owner TAIWAN CARBON NANO TECHNOLOGY CORPORATION
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