Multifunctional sample stage

A sample stage, multifunctional technology, applied in the field of multifunctional sample stage, can solve the problem of not changing the sample space position, affecting the success rate and efficiency of the failure analysis process, to avoid damage, improve the success rate and efficiency, and reduce damage. Effect

Pending Publication Date: 2019-01-18
胜科纳米(苏州)股份有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The traditional sample stage can only perform simple translation observation and operation on the sample. Although the rotation observation of the sample can be realized within the field of view by adjusting the angle of the imaging device, the spatial position of the sample cannot be changed.
On the other hand, when it is necessary to perform failure analysis on the sample, it is necessary to transfer the sample from the sample stage to a system suitable for the process, which affects the success rate and efficiency of the entire failure analysis process

Method used

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Embodiment Construction

[0023] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0024] The present invention provides a multifunctional sample stage, including: a sample stage body 100 . Such as Figure 1a with Figure 1b As shown, the sample stage body 100 is made of non-magnetic material or non-conductive material. Specifically, the sample stage body 100 is semi-cylindrical, and at least one window 110 is provided on the cut surface of the semi-cylindrical sample stage body 100, and the window 110 is used to carry samples, and the window 110 is U-shaped. , the surface and cros...

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Abstract

The invention discloses a multifunctional sample stage, comprising: a sample stage body, wherein the sample stage body is made of a non-magnetic material or a non-conductor material, the sample stagebody is semi-cylindrical, and at least one window is opened on the section of the semi-cylindrical sample stage body. The multifunctional sample stage provided by the invention can be applied to existing FIB and TEM systems, and can also realize effective integration of three-step failure analysis process consisting of atomic bit FIB stripping, nanoprobe electrical test and TEM analysis of samples. That is, in the entire failure analysis process, sample transfer is not required. Therefore, the multifunctional sample stage provided by the invention can improve the success rate and efficiency ofthe entire failure analysis process, and avoid and reduce the damage, loss and pollution of the sample in the failure analysis work.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a multifunctional sample stage. Background technique [0002] With the development of technology, the observation and manipulation of micro samples are widely used in aerospace, automobile industry, semiconductor, biomedicine, MEMS, polymer, solar energy / fuel cell chemical industry, petroleum, rock, microelectronics, micro sensor, semiconductor Materials, automatic control, aerospace, automotive industry and machine tools. [0003] The traditional sample stage can only perform simple translation observation and operation on the sample. Although the rotation observation of the sample can be realized within the field of view by adjusting the angle of the imaging device, the spatial position of the sample cannot be changed. On the other hand, when it is necessary to perform failure analysis on the sample, it is necessary to transfer the sample from the sample stage t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2204
CPCG01N23/2204
Inventor 刘兵海华佑南傅超李晓旻
Owner 胜科纳米(苏州)股份有限公司
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