Measuring device and measuring method of multiple-parameter distribution and characterization for surface scattering of high reflection lens

A technology of surface scattering and measurement device, which is applied in measurement device, measurement of scattering characteristics, analysis of materials, etc., can solve the problem of not being able to detect the backscattering rate and forward scattering rate of high-reflecting mirrors of laser gyro at the same time, and achieve high detection efficiency. , Improve the quality of assembly, the effect of strong beam adaptability

Pending Publication Date: 2019-02-01
XIAN TECHNOLOGICAL UNIV
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Problems solved by technology

[0004] The present invention provides a high-reflection mirror surface scattering multi-parameter distribution characterization measurement device and measurement method to overcome the inability of the prior art to simultaneously detect the defects of the laser gyro high-reflection mirror and the backscattering rate and forward scattering rate caused by the defect area. The problem with scatter

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  • Measuring device and measuring method of multiple-parameter distribution and characterization for surface scattering of high reflection lens

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Embodiment Construction

[0022] The present invention will be described in detail below with reference to the drawings and embodiments.

[0023] The present invention combines the detection of existing optical element surface flaws and laser gyroscope backscattering rate, designs a kind of can detect laser gyroscope high reflective mirror surface flaws and can measure the backscattering rate and forward scattering rate of selected area at the same time rate detection device.

[0024] refer to figure 1 , a highly reflective mirror surface scattering multi-parameter distribution characterization measurement device is composed of a semiconductor laser 1, a CCD imaging system, two integral scattering rate measurement components and a light trap 7, and the CCD imaging system includes a CCD camera 3 and a microscope lens 4. A beam switching drum 2 and a back integrated scatter rate measurement component 5 are sequentially arranged on the incident light path of the laser beam, and a forward integrated scatt...

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Abstract

The invention relates to a measuring device and a measuring method of multiple-parameter distribution and characterization for the surface scattering of a high reflection lens. The device is composedof a semiconductor laser, a CCD imaging system, two integrated scattering rate measuring assemblies, and a light trap. The CCD imaging system comprises a CCD camera and a microlens. A beam switching drum and a backward integrated scattering rate measuring assembly are sequentially arranged on the laser beam incident path. A forward integrated scattering rate measuring assembly is arranged on the reflection path. According to the measuring device and the measuring method of multiple-parameter distribution and characterization for the surface scattering of a high reflection lens, the problem inthe prior art that the defect of the high reflection lens of the laser gyro and the backscatter rate and the forward-scattering rate caused by the defect region cannot be detected at the same time isovercome.

Description

Technical field: [0001] The invention belongs to the technical field of optical instrument detection, and in particular relates to a high reflection mirror surface scattering multi-parameter distribution characterization measurement device and a measurement method. Background technique: [0002] When the input speed of the laser gyroscope is lower than a certain threshold, the clockwise and counterclockwise beams in the gyroscope will produce a synchronization phenomenon, that is, the locking effect, and the working area below this threshold is called the locking area. The propagation of light in directions other than the chief ray is usually called light scattering, and backscattering refers to the scattered light in the direction opposite to the principal ray, which is difficult to measure directly. The defect of the highly reflective mirror in the ring resonant cavity of the laser gyroscope will cause the phenomenon of back and forward light scattering in the gyroscope op...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01N21/958G01N21/47G01N21/01
CPCG01N21/01G01N21/47G01N21/95G01N21/958G01N2021/9511G01N2021/4707G01N2021/4709G01N2021/4735G01N2021/0112
Inventor 高爱华侯劲尧刘卫国秦文罡韦瑶
Owner XIAN TECHNOLOGICAL UNIV
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